Invention Grant
- Patent Title: Charge detection sensor and potential measurement system
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Application No.: US16646185Application Date: 2018-08-14
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Publication No.: US11754610B2Publication Date: 2023-09-12
- Inventor: Jun Ogi , Yuri Kato , Naohiko Kimizuka , Yoshihisa Matoba , Kan Shimizu
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: CHIP LAW GROUP
- Priority: JP 17179872 2017.09.20
- International Application: PCT/JP2018/030255 2018.08.14
- International Announcement: WO2019/058815A 2019.03.28
- Date entered country: 2020-03-11
- Main IPC: G01R29/24
- IPC: G01R29/24 ; G01N27/414

Abstract:
To achieve decreased noise and improved sensitivity by reducing parasitic capacitance in a charge detection sensor. The charge detection sensor includes a detection element, a detection electrode, and a contact. The detection element is provided on one surface of a semiconductor substrate and detects a charge. The detection electrode is provided on another surface different from the one surface of the semiconductor substrate. The contact penetrates the semiconductor substrate and electrically connects the detection electrode and the detection element. Since no wiring layer is formed between the detection element and the detection electrode, the parasitic capacitance is reduced.
Public/Granted literature
- US20200271710A1 CHARGE DETECTION SENSOR AND POTENTIAL MEASUREMENT SYSTEM Public/Granted day:2020-08-27
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