- Patent Title: Hybrid material post-CMP brushes and methods for forming the same
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Application No.: US16890535Application Date: 2020-06-02
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Publication No.: US11684144B2Publication Date: 2023-06-27
- Inventor: Bradley Scott Withers , Yuyan Luo , Erik Scott Nelson , Brent Allan Best
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: A46B9/06
- IPC: A46B9/06 ; H01L21/67 ; A46B9/00 ; A46D3/00 ; B29C45/16 ; H01L21/02 ; A46B13/02 ; B08B3/10 ; B29K31/00 ; B29L31/42

Abstract:
Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.
Public/Granted literature
- US20200288857A1 HYBRID MATERIAL POST-CMP BRUSHES AND METHODS FOR FORMING THE SAME Public/Granted day:2020-09-17
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