发明授权
- 专利标题: Three-dimensional semiconductor memory device and method of fabricating the same
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申请号: US17113456申请日: 2020-12-07
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公开(公告)号: US11626417B2公开(公告)日: 2023-04-11
- 发明人: Dong-Sik Lee , Byungjin Lee , Sung-Min Hwang
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR10-2020-0007787 20200121
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11556 ; H01L27/11526 ; H01L27/11573 ; H01L27/11519 ; H01L27/11565
摘要:
A three-dimensional semiconductor memory device includes a substrate including cell and connection regions. An electrode structure is disposed on the substrate, the electrode structure having a staircase structure on the connection region. A first vertical channel structure and a first dummy structure at least partially penetrate the electrode structure on the cell region and the connection region, respectively. Bottoms of expanded portions of the first vertical channel structure and the first dummy structure are located at first and second levels, respectively. The second level is higher than the first level.
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