发明授权
- 专利标题: Method for forming three-dimensional memory device with backside source contact
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申请号: US16881324申请日: 2020-05-22
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公开(公告)号: US11626416B2公开(公告)日: 2023-04-11
- 发明人: Kun Zhang , Linchun Wu , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Wuhan
- 代理机构: Bayes PLLC
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L25/00 ; H01L27/11565 ; H01L27/1157 ; H01L27/11573
摘要:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer above a second semiconductor layer at a first side of a substrate and a dielectric stack on the sacrificial layer are subsequently formed. A channel structure extending vertically through the dielectric stack and the sacrificial layer into the second semiconductor layer is formed. The sacrificial layer is replaced with a first semiconductor layer in contact with the second semiconductor layer. The dielectric stack is replaced with a memory stack, such that the channel structure extends vertically through the memory stack and the first semiconductor layer into the second semiconductor layer. A source contact is formed at a second side opposite to the first side of the substrate to be in contact with the second semiconductor layer.
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