Invention Grant
- Patent Title: Buffer layer in memory cell to prevent metal redeposition
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Application No.: US17074843Application Date: 2020-10-20
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Publication No.: US11532785B2Publication Date: 2022-12-20
- Inventor: Chung-Chiang Min , Chang-Chih Huang , Yuan-Tai Tseng , Kuo-Chyuan Tzeng , Yihuei Zhu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Some embodiments relate to a memory device. The memory device includes a first electrode overlying a substrate. A data storage layer overlies the first electrode. A second electrode overlies the data storage layer. A conductive bridge is selectively formable within the data storage layer to couple the first electrode to the second electrode. An active metal layer is disposed between the data storage layer and the second electrode. A buffer layer is disposed between the active metal layer and the second electrode. The buffer layer has a lower reactivity to oxygen than the active metal layer.
Public/Granted literature
- US20220123207A1 BUFFER LAYER IN MEMORY CELL TO PREVENT METAL REDEPOSITION Public/Granted day:2022-04-21
Information query
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