Invention Grant
- Patent Title: Multi-function substrate
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Application No.: US17189709Application Date: 2021-03-02
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Publication No.: US11532642B2Publication Date: 2022-12-20
- Inventor: Eugene I-Chun Chen , Kuan-Liang Liu , Szu-Yu Wang , Chia-Shiung Tsai , Ru-Liang Lee , Chih-Ping Chao , Alexander Kalnitsky
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/762 ; H01L21/02

Abstract:
The present disclosure relates an integrated chip. The integrated chip includes a polysilicon layer arranged on an upper surface of a base substrate. A dielectric layer is arranged over the polysilicon layer, and an active semiconductor layer is arranged over the dielectric layer. A semiconductor material is arranged vertically on the upper surface of the base substrate and laterally beside the active semiconductor layer.
Public/Granted literature
- US20220189997A1 MULTI-FUNCTION SUBSTRATE Public/Granted day:2022-06-16
Information query
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