- 专利标题: Multi-function substrate
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申请号: US17189709申请日: 2021-03-02
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公开(公告)号: US11532642B2公开(公告)日: 2022-12-20
- 发明人: Eugene I-Chun Chen , Kuan-Liang Liu , Szu-Yu Wang , Chia-Shiung Tsai , Ru-Liang Lee , Chih-Ping Chao , Alexander Kalnitsky
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/762 ; H01L21/02
摘要:
The present disclosure relates an integrated chip. The integrated chip includes a polysilicon layer arranged on an upper surface of a base substrate. A dielectric layer is arranged over the polysilicon layer, and an active semiconductor layer is arranged over the dielectric layer. A semiconductor material is arranged vertically on the upper surface of the base substrate and laterally beside the active semiconductor layer.
公开/授权文献
- US20220189997A1 MULTI-FUNCTION SUBSTRATE 公开/授权日:2022-06-16
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