Invention Grant
- Patent Title: Through-substrate waveguide
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Application No.: US16394905Application Date: 2019-04-25
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Publication No.: US11532574B2Publication Date: 2022-12-20
- Inventor: Aleksandar Aleksov , Georgios Dogiamis , Telesphor Kamgaing , Gilbert W. Dewey , Hyung-Jin Lee
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP PC
- Priority: GR20190100117 20190312
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/66 ; H01L23/13 ; H01L23/498 ; H01L23/00 ; H01L21/48 ; H01P3/16 ; H01P3/06 ; H01P11/00

Abstract:
Embodiments may relate to a semiconductor package that includes a die and a package substrate. The package substrate may include one or more cavities that go through the package substrate from a first side of the package substrate that faces the die to a second side of the package substrate opposite the first side. The semiconductor package may further include a waveguide communicatively coupled with the die. The waveguide may extend through one of the one or more cavities such that the waveguide protrudes from the second side of the package substrate. Other embodiments may be described or claimed.
Public/Granted literature
- US20200294939A1 THROUGH-SUBSTRATE WAVEGUIDE Public/Granted day:2020-09-17
Information query
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