Invention Grant
- Patent Title: Separation of contributions to metrology data
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Application No.: US16075696Application Date: 2017-02-17
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Publication No.: US11520239B2Publication Date: 2022-12-06
- Inventor: Wim Tjibbo Tel , Frank Staals , Mark John Maslow , Roy Anunciado , Marinus Jochemsen , Hugo Augustinus Joseph Cramer , Thomas Theeuwes , Paul Christiaan Hinnen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2017/053700 WO 20170217
- International Announcement: WO2017/144379 WO 20170831
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
A method including: computing a value of a first variable of a pattern of, or for, a substrate processed by a patterning process by combining a fingerprint of the first variable on the substrate and a certain value of the first variable; and determining a value of a second variable of the pattern based at least in part on the computed value of the first variable.
Public/Granted literature
- US20190086810A1 SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA Public/Granted day:2019-03-21
Information query
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