- 专利标题: Semiconductor memory device and manufacturing method thereof
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申请号: US17121940申请日: 2020-12-15
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公开(公告)号: US11488976B2公开(公告)日: 2022-11-01
- 发明人: Sung Lae Oh , Dong Hyuk Kim , Tae Sung Park , Soo Nam Jung
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si
- 优先权: KR10-2019-0085409 20190715
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L23/528 ; H01L23/522 ; H01L27/11526 ; H01L21/768 ; H01L21/311 ; H01L25/00 ; H01L25/18 ; H01L23/00 ; H01L27/11573 ; H01L27/11556
摘要:
A method for manufacturing a semiconductor memory device may include: forming a pre-stack by alternately stacking a plurality of first dielectric layers and a plurality of second dielectric layers over a substrate which has a cell area and a connection area; forming a plurality of slits which pass through the pre-stack, such that a distance between the slits in the connection area is larger than a distance between the slits in the cell area; removing the second dielectric layers in the cell area and in a periphery of the connection area adjacent to the slits while leaving the second dielectric layer in a center of the connection area by injecting an etching solution for removing the second dielectric layers, through the slits; and forming electrode layers in spaces from which the second dielectric layers are removed.
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