发明授权
- 专利标题: Gate contact structures and cross-coupled contact structures for transistor devices
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申请号: US16804264申请日: 2020-02-28
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公开(公告)号: US11469309B2公开(公告)日: 2022-10-11
- 发明人: Ruilong Xie , Youngtag Woo , Daniel Chanemougame , Bipul C. Paul , Lars W. Liebmann , Heimanu Niebojewski , Xuelian Zhu , Lei Sun , Hui Zang
- 申请人: GLOBALFOUNDRIES U.S. Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Hoffman Warnick LLC
- 代理商 Francois Pagette
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L27/092 ; H01L29/78 ; H01L21/28 ; H01L29/66 ; H01L29/417 ; H01L21/8234 ; H01L27/088
摘要:
One illustrative integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor with an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure and a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor. In this example, the product also includes a gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of each of the GSD contact structure and the gate contact structure is positioned at a first level that is at a level that is above a level of an upper surface of the insulating source/drain cap.
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IPC分类: