Invention Grant
- Patent Title: High sensitivity TMR magnetic sensor
-
Application No.: US16718351Application Date: 2019-12-18
-
Publication No.: US11428758B2Publication Date: 2022-08-30
- Inventor: Chih-Ching Hu , Yung-Hung Wang , Ming Mao , Daniele Mauri , Ming Jiang
- Applicant: Western Digital Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Western Digital Technologies, Inc.
- Current Assignee: Western Digital Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patterson + Sheridan, LLP
- Agent Steven H. VerSteeg
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01L43/08 ; H01L27/22 ; H01L43/10 ; H01L43/12 ; H01F10/32 ; H01F41/30

Abstract:
A tunneling magnetoresistance (TMR) sensor device is disclosed that includes one or more TMR resistors. The TMR sensor device comprises a first TMR resistor comprising a first TMR film, a second TMR resistor comprising a second TMR film different than the first TMR film, a third TMR resistor comprising the second TMR film, and a fourth TMR resistor comprising the first TMR film. The first and fourth TMR resistors are disposed in a first plane while the second and third TMR resistors are disposed in a second plane different than the first plane. The first TMR film comprises a synthetic anti-ferromagnetic pinned layer having a magnetization direction of a reference layer orthogonal to a magnetization direction a free layer. The second TMR film comprises a double synthetic anti-ferromagnetic pinned layer having a magnetization direction of a reference layer orthogonal to a magnetization direction of a free layer.
Public/Granted literature
- US20210063503A1 High Sensitivity TMR Magnetic Sensor Public/Granted day:2021-03-04
Information query