Invention Grant
- Patent Title: EMI shielding for flip chip package with exposed die backside
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Application No.: US17008997Application Date: 2020-09-01
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Publication No.: US11342278B2Publication Date: 2022-05-24
- Inventor: SungWon Cho , ChangOh Kim , Il Kwon Shim , InSang Yoon , KyoungHee Park
- Applicant: STATS ChipPAC Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Brian M. Kaufman; Robert D. Atkins
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/28 ; H01L21/00 ; H05K7/20 ; H01L23/552 ; H01L23/00 ; H01L23/36 ; H01L23/522 ; H01L23/50 ; H01L23/60 ; H01L23/498 ; H01L27/02 ; H01L23/31 ; H01L23/367

Abstract:
A semiconductor device has a substrate and a semiconductor die disposed over the substrate. An encapsulant is deposited over the semiconductor die and substrate with a surface of the semiconductor die exposed from the encapsulant. A first shielding layer is formed over the semiconductor die. In some embodiments, the first shielding layer includes a stainless steel layer in contact with the surface of the semiconductor die and a copper layer formed over the stainless steel layer. The first shielding layer may further include a protective layer formed over the copper layer. One embodiment has a heatsink bonded to the semiconductor die through a solder layer. A second shielding layer can be formed over a side surface of the semiconductor die.
Information query
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