- Patent Title: Three-dimensional (3D), vertically-integrated field-effect transistors (FETs) electrically coupled by integrated vertical FET-to-FET interconnects for complementary metal-oxide semiconductor (CMOS) cell circuits
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Application No.: US16811762Application Date: 2020-03-06
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Publication No.: US11296083B2Publication Date: 2022-04-05
- Inventor: Ye Lu , Lixin Ge , Kwanyong Lim , Jun Chen
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Withrow & Terranova
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L23/522 ; H01L29/417 ; H01L29/08 ; H01L29/10 ; H01L21/822 ; H01L21/8238 ; H01L29/06

Abstract:
3D vertically-integrated FETs electrically coupled by integrated vertical FET-to-FET interconnects for reducing an area of CMOS cell circuits are disclosed. Vertically integrated FETs reduce a footprint area of an integrated circuit chip. The FETs include horizontal channel structures that are vertically integrated by stacking a second channel structure of a second FET above a first channel structure of a first FET. The first and second FETs can include a combination of a PFET and NFET that can be used to form a 3D CMOS cell circuit as an example. The area occupied by the 3D CMOS cell circuit includes interconnects for electrically coupling terminal regions of the FETs internally and externally. Vertical FET-to-FET interconnects extend between the FETs to electrically couple terminal regions of the FETs to reduce a number of vias from a semiconductor layer of the 3D CMOS cell circuit to metal interconnect layers above the vertically-integrated FETs.
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