Invention Grant
- Patent Title: Phased array modular high-frequency source
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Application No.: US16895904Application Date: 2020-06-08
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Publication No.: US11114282B2Publication Date: 2021-09-07
- Inventor: Philip Allan Kraus , Thai Cheng Chua , Christian Amormino , Dmitry A. Dzilno
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01Q3/34 ; H01Q21/00 ; H03B5/24

Abstract:
Embodiments described herein include a modular high-frequency emission source comprising a plurality of high-frequency emission modules and a phase controller. In an embodiment, each high-frequency emission module comprises an oscillator module, an amplification module, and an applicator. In an embodiment, each oscillator module comprises a voltage control circuit and a voltage controlled oscillator. In an embodiment, each amplification module is coupled to an oscillator module, in an embodiment, each applicator is coupled to an amplification module. In an embodiment, the phase controller is communicatively coupled to each oscillator module.
Public/Granted literature
- US20200303167A1 PHASED ARRAY MODULAR HIGH-FREQUENCY SOURCE Public/Granted day:2020-09-24
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