- 专利标题： TFT circuit board and display device having the same
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申请号： US15649126申请日： 2017-07-13
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公开(公告)号： US11063154B2公开(公告)日： 2021-07-13
- 发明人: Yohei Yamaguchi , Kazufumi Watabe , Tomoyuki Ariyoshi , Osamu Karikome , Ryohei Takaya
- 申请人： Japan Display Inc.
- 申请人地址： JP Tokyo
- 专利权人： Japan Display Inc.
- 当前专利权人： Japan Display Inc.
- 当前专利权人地址： JP Tokyo
- 代理机构： Michael Best & Friedrich LLP
- 优先权： JPJP2016-141228 20160719
- 主分类号： H01L29/786
- IPC分类号： H01L29/786 ; H01L27/12 ; H01L29/45 ; H01L29/49 ; H01L29/423 ; H01L29/40
摘要：
The invention allows stable fabrication of a TFT circuit board used in a display device and having thereon an oxide semiconductor TFT. A TFT circuit board includes a TFT that includes an oxide semiconductor. The TFT has a gate insulating film formed on part of the oxide semiconductor and a gate electrode formed on the gate insulating film. A portion of the oxide semiconductor that is covered with the gate electrode 104 and a portion of the oxide semiconductor that is not covered with the gate electrode are both covered with a first interlayer insulating film. The first interlayer insulating film is covered with a first film 106, and the first film is covered with a first AlO film.
公开/授权文献
- US20180026138A1 TFT circuit board and display device having the same 公开/授权日：2018-01-25
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