- 专利标题: Laser cleaning apparatus and laser cleaning method
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申请号: US16133199申请日: 2018-09-17
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公开(公告)号: US11052436B2公开(公告)日: 2021-07-06
- 发明人: Chun-Ming Chen , Chien-Jung Huang , Yu-Chung Lin , Chieh-Ting Tseng , Min-Kai Lee
- 申请人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 申请人地址: TW Hsinchu
- 专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rabin & Berdo, P.C.
- 优先权: TW107112771 20180413
- 主分类号: B08B7/00
- IPC分类号: B08B7/00 ; B23K26/064 ; B23K26/06 ; B23K26/067
摘要:
A laser cleaning apparatus and a laser cleaning method are furnished, for switching the wavelengths of laser beams furnished by a single laser module using a wavelength switching module and cleaning a test piece using the laser beams having wavelengths and energy suitable for manufacturing needs. The laser cleaning method includes: creating a laser beam; switching the wavelength output by the laser based on process requirements; propagating the laser beam via an optical path propagating module for laser cleaning the test piece; and removing debris. A transfer platform allows movements of the laser beams with respect to the test piece to achieve cleaning of the entire test piece. A control module controls the wavelength switching unit, the laser beam regulating module, and the transfer platform. Total laser cleaning with improved laser cleaning quality is achieved by using these laser beams with the appropriate wavelengths and energy.
公开/授权文献
- US20190314871A1 LASER CLEANING APPARATUS AND LASER CLEANING METHOD 公开/授权日:2019-10-17
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