Invention Grant
- Patent Title: Charged particle detector and charged particle beam apparatus
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Application No.: US16475726Application Date: 2018-01-25
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Publication No.: US10984979B2Publication Date: 2021-04-20
- Inventor: Shin Imamura , Takashi Ohshima , Tomonobu Tsuchiya , Hajime Kawano , Shahedul Hoque , Shunsuke Mizutani , Makoto Suzuki
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JPJP2017-014978 20170131
- International Application: PCT/JP2018/002319 WO 20180125
- International Announcement: WO2018/143054 WO 20180809
- Main IPC: G01T1/20
- IPC: G01T1/20 ; H01J37/244 ; G01N23/2258 ; H01J37/28 ; H01J49/02
Abstract:
The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x
Public/Granted literature
- US20190355549A1 CHARGED PARTICLE DETECTOR AND CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2019-11-21
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