- 专利标题: Apparatus and methods for creating a thermal interface bond between a semiconductor die and a passive heat exchanger
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申请号: US16246417申请日: 2019-01-11
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公开(公告)号: US10943795B2公开(公告)日: 2021-03-09
- 发明人: Ross B. Berntson , James E. Hisert , Robert N. Jarrett , Jordan P. Ross
- 申请人: Indium Corporation
- 申请人地址: US NY Utica
- 专利权人: Indium Corporation
- 当前专利权人: Indium Corporation
- 当前专利权人地址: US NY Utica
- 代理机构: Sheppard, Mullin, Richter & Hampton LLP
- 主分类号: H01L21/44
- IPC分类号: H01L21/44 ; H01L21/48 ; H01L21/50 ; H01L23/367 ; H01L23/373 ; H01L33/64
摘要:
A method of joining a semiconductor die to a passive heat exchanger can include applying a bond enhancing agent to a semiconductor device; creating an assembly that includes a thermal interface disposed on the semiconductor device such that a first major surface of the thermal interface material is in touching relation with the bond enhancing agent on the semiconductor device, and a heat exchanger disposed in touching relation with a second major surface of the thermal interface material; and reflowing the assembly such that the thermal interface bonds the heat exchanger to the semiconductor device. Embodiments can use the ability of indium to bond to a non-metallic surface to form the thermal interface, which may be enhanced by a secondary coating on either or both joining surfaces.
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