- 专利标题: Positioning air-gap spacers in a transistor for improved control of parasitic capacitance
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申请号: US16363355申请日: 2019-03-25
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公开(公告)号: US10903331B2公开(公告)日: 2021-01-26
- 发明人: Nicolas Loubet , Kangguo Cheng , Wenyu Xu , Julien Frougier
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Joseph Petrokaitis
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L29/66 ; H01L29/78
摘要:
Embodiments of the invention are directed to a method of fabricating a field effect transistor device, wherein the fabrication operations include forming a channel region over a substrate, forming a gate region over a top surface and along sidewalls of the channel region, and forming a source or drain (S/D) region over the substrate. A bottom encapsulated air-gap is formed over the substrate, and a first portion of the bottom encapsulated air-gap is positioned between the gate region and the S/D region. The first portion of the bottom encapsulated air-gap is further positioned below the top surface of the channel region.
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