发明授权
- 专利标题: FOUP purge shield
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申请号: US16048200申请日: 2018-07-27
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公开(公告)号: US10784136B2公开(公告)日: 2020-09-22
- 发明人: Paul A. Doyle , Morgan A. Crouch
- 申请人: ONTO INNOVATION INC.
- 申请人地址: US MA Wilmington
- 专利权人: ONTO INNOVATION INC.
- 当前专利权人: ONTO INNOVATION INC.
- 当前专利权人地址: US MA Wilmington
- 代理机构: Paradice and Li LLP
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/673 ; B08B5/00
摘要:
A load port for loading wafers to and unloading wafers from a front opening unified pod (FOUP) includes a shield member that covers and provides a seal over an opening of the FOUP. The shield member includes a narrow wafer slot that is sized to allow a single wafer to be loaded to or unloaded from the FOUP but otherwise minimize loss of the purge environment within the FOUP. The shield member is movable so that the wafer slot may be moved vertically to provide a wafer transfer robot access to any desired wafer position within the FOUP. The shield member, for example, may be a flexible sheet that is held taut and is rolled onto and off of at least one roller to vertically position the wafer slot. The shield member may alternatively be one or more rigid members that slide on rails to vertically position the wafer slot.
公开/授权文献
- US20200035531A1 FOUP PURGE SHIELD 公开/授权日:2020-01-30
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