- 专利标题: Solder ball supplying method, solder ball supplying device, and solder bump forming method
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申请号: US14392168申请日: 2013-06-26
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公开(公告)号: US10722965B2公开(公告)日: 2020-07-28
- 发明人: Kaichi Tsuruta , Takeo Saito , Manabu Muraoka , Hiroki Oshima
- 申请人: Senju Metal Industry Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Senju Metal Industry Co., Ltd.
- 当前专利权人: Senju Metal Industry Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: The Webb Law Firm
- 国际申请: PCT/JP2013/067504 WO 20130626
- 国际公布: WO2014/207835 WO 20141231
- 主分类号: B23K3/06
- IPC分类号: B23K3/06 ; B23K1/00
摘要:
A solder-ball-supplying method, a solder-ball-supplying device and a solder-bump-forming method, which are flux-less and capable of being also applied to electrodes having a fine pitch. A substrate on which a resist with openings is positioned on electrode(s), which has a diameter of 10 through 30 μm, of the substrate is prepared. Next, plural solder balls SBL each having a grain diameter of 1 through 10 μm are shaken down to the opening(s) of the resist from a hopper and filled therein. Next, by sliding and moving a squeegee on an upper surface of the resist along X-Y direction, the solder balls SBL shaken down to the resist other than the openings are scrapped and removed and the solder balls SBL in the openings and around them are pushed into the openings by the squeegee.
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