- 专利标题: Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
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申请号: US16226847申请日: 2018-12-20
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公开(公告)号: US10546945B2公开(公告)日: 2020-01-28
- 发明人: Julien Frougier , Ruilong Xie , Steven Bentley , Kangguo Cheng , Nicolas Loubet , Pietro Montanini
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Garg Law Firm, PLLC
- 代理商 Rakesh Garg; Joseph Petrokaitis
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/423 ; H01L29/78
摘要:
Fabricating a feedback field effect transistor includes receiving a semiconductor structure including a substrate, a first source/drain disposed on the substrate, a fin disposed on the first source/drain, and a hard mask disposed on a top surface of the fin. A bottom spacer is formed on a portion of the first source/drain. A first gate is formed upon the bottom spacer. A sacrificial spacer is formed upon the first gate, a gate spacer is formed on the first gate from the sacrificial spacer, and a second gate is formed on the gate spacer. The gate spacer is disposed between the first gate and the second gate. A top spacer is formed around portions of the second gate and hard mask, a recess is formed in the top spacer and hard mask, and a second source/drain is formed in the recess.
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