- 专利标题: Methods of forming V0 structures for semiconductor devices by forming a protection layer with a non-uniform thickness
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申请号: US14732038申请日: 2015-06-05
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公开(公告)号: US10546854B2公开(公告)日: 2020-01-28
- 发明人: Ruilong Xie , Xunyuan Zhang
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L29/66 ; H01L21/8234 ; H01L29/78 ; H01L29/417 ; H01L21/768 ; H01L23/485
摘要:
One illustrative method disclosed herein includes, among other things, forming a source/drain contact structure between two spaced-apart transistor gate structures, forming a non-uniform thickness layer of material on the upper surface of the gate cap layers and on the upper surface of the source/drain contact structure, wherein the non-uniform thickness layer of material is thicker above the gate cap layers than it is above the source/drain contact structure, forming an opening in the non-uniform thickness layer of material so as to expose at least a portion of the source/drain contact structure, and forming a V0 via that is conductively coupled to the exposed portion of the source/drain contact structure, the V0 via being at least partially positioned in the opening in the non-uniform thickness layer of material.
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