- 专利标题: System and method for wafer inspection with a noise boundary threshold
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申请号: US15388577申请日: 2016-12-22
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公开(公告)号: US10533953B2公开(公告)日: 2020-01-14
- 发明人: Xuguang Jiang , Yong Zhang
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G01N21/95 ; G06T7/136 ; G06T5/40 ; G06T7/00 ; H01L21/66 ; G01N21/956 ; G01N21/88
摘要:
A method includes receiving one or more images of three or more die of a wafer, determining a median intensity value of a set of pixel intensity values acquired from a same location on each of the three or more die, determining a difference intensity value for the set of pixel intensity values by comparing the median intensity value of the set of pixel intensity values to each pixel intensity value, grouping the pixel intensity values into an intensity bin based on the median intensity value of the set of pixel intensity values, generating an initial noise boundary based on a selected difference intensity value in the intensity bin, generating a final noise boundary by adjusting the initial noise boundary, generating a detection boundary by applying a threshold to the final noise boundary, and classifying one or more pixel intensity values outside the detection boundary as a defect.
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