Invention Grant
- Patent Title: Dynamic random access memory structure and method for forming the same
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Application No.: US15936396Application Date: 2018-03-26
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Publication No.: US10453849B2Publication Date: 2019-10-22
- Inventor: En-Chiuan Liou , Yu-Cheng Tung , Chih-Wei Yang , Sho-Shen Lee
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Agent Winston Hsu
- Priority: CN201810171723 20180301
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L27/108 ; G11C11/401

Abstract:
The present invention provides a dynamic random access memory structure, comprising a substrate defining a cell region and a peripheral region on the substrate, a shallow trench isolation structure located in the peripheral region adjacent to the cell region, wherein the shallow trench isolation structure has a concave top surface, a first dummy bit line gate located within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate located in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
Public/Granted literature
- US20190273083A1 DYNAMIC RANDOM ACCESS MEMORY STRUCTURE AND METHOD FOR FORMING THE SAME Public/Granted day:2019-09-05
Information query
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