- 专利标题: Thin film transistor and method for manufacturing the same
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申请号: US15328945申请日: 2017-01-11
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公开(公告)号: US10367066B2公开(公告)日: 2019-07-30
- 发明人: Longqiang Shi
- 申请人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Shenzhen
- 专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Shenzhen
- 优先权: CN201610793911 20160831
- 国际申请: PCT/CN2017/070829 WO 20170111
- 国际公布: WO2018/040475 WO 20180308
- 主分类号: H01L29/24
- IPC分类号: H01L29/24 ; H01L21/322 ; H01L21/443 ; H01L29/45 ; H01L29/66 ; H01L29/786
摘要:
Disclosed are a thin film transistor and a method for manufacturing the same, which relates to the technical field of display. Each of a source and a drain of the thin film transistor includes a first metal layer, a second metal layer, and a third metal layer. The first metal layer is in contact with an IGZO (indium gallium zinc oxide) layer, and a metal diffusion layer is provided at a contact face. Meanwhile, disclosed is a method for manufacturing the thin film transistor: sequentially obtaining the first metal layer, the second metal layer, and the third metal layer through deposition; then obtaining PV layers; and then performing high temperature annealing treatment on the PV layers to diffuse a metal within the first metal layer into the IGZO layer, thereby forming a metal diffusion layer. The metal diffusion layer forms Ohmic contact between the first metal layer and the IGZO layer, thus reducing contact resistance both between the source and the IGZO layer and between the drain and the IGZO layer.
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