Invention Grant
- Patent Title: Semiconductor devices having lower and upper fins and method for fabricating the same
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Application No.: US16128152Application Date: 2018-09-11
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Publication No.: US10319858B2Publication Date: 2019-06-11
- Inventor: Sung-Min Kim , Kyung-Seok Oh , Cheol Kim , Heon-Jong Shin , Jong-Ryeol Yoo , Hyun-Jung Lee , Seong-Hoon Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0084463 20140707
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L27/12 ; H01L29/66 ; H01L29/78

Abstract:
Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes a lower fin that protrudes from a substrate and extends in a first direction, an oxide film the lower fin, an upper fin that protrudes from the oxide film and that is spaced apart from the lower fin at a position corresponding to the lower fin, and a gate structure the upper fin that extends in a second direction to intersect the upper fin, wherein germanium (Ge) is included in a portion of the oxide film located between the lower fin and the upper fin.
Public/Granted literature
- US20190013401A1 SEMICONDUCTOR DEVICES HAVING LOWER AND UPPER FINS AND METHOD FOR FABRICATING THE SAME Public/Granted day:2019-01-10
Information query
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