Provided is a substrate floating transport device which makes it possible to easily hold a floating substrate at a certain height without complicating the device configuration or increasing the cost thereof. Specifically, the substrate floating transport device is provided with: a floating stage which causes a substrate to float; a substrate holding unit which holds the substrate being caused to float by the floating stage; and a transport drive unit which causes the substrate to be moved in a transport direction by moving the substrate holding unit with the substrate being held by the substrate holding unit. The substrate holding unit includes a plurality of suction attachment units which suction-attach the substrate, and a holding frame unit on which all of the suction attachment units are mounted in a state of being arranged in the transport direction. The holding frame unit is attached to the transport drive unit via a lifting/lowering unit, and is formed such that, as the lifting/lowering unit is operated, the holding frame unit performs a lifting/lowering operation to move all of the suction attachment units toward or away from the substrate.