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发明公开
CN107887318A 一种晶圆盘定位装置 无效 - 撤回 转让

一种晶圆盘定位装置
摘要：
本发明公开了一种晶圆盘定位装置，包括支撑架和用于定位晶圆盘的定位块，支撑架内侧定位面的横截面的中心为定位中心，定位面用于与校准装置定位贴合连接，在定位状态下定位中心与校准装置的中心重合；定位块设于支撑架的上端面，定位块至少有两个且每个定位块到定位中心的距离均相同。本发明公开的晶圆盘定位装置在进行校准之前，使晶圆盘和校准装置同心得放置在一起，减小了晶圆盘与校准装置的偏心距离，提高了校准前晶圆盘在校准装置上的定位精度，同时提高校准效率。
摘要（英）：

The invention discloses a wafer disc positioning device which comprises a supporting frame and at least two positioning blocks for positioning the wafer disc. The center of a cross section of a positioning surface inside the supporting frame is a positioning center, and the positioning surface is used for the positioning fit connection with a calibration device. In a positioning state, the positioning center is aligned with the center of the calibration device. The positioning blocks are arranged at an upper end surface of the supporting frame, and the distance between each positioning block and the positioning center is the same. According to the wafer disc positioning device, before calibration, the wafer disc and the calibration device are concentrically arranged, the eccentric distanceof the wafer disc and the calibration device is reduced, the positioning accuracy of the wafer disc on the calibration device before calibration is improved, and the calibration efficiency is improved.

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