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CN104060225A 在基底上沉积层体系的涂布方法和具有层体系的基底 无效 - 驳回

在基底上沉积层体系的涂布方法和具有层体系的基底
摘要：
本发明涉及在基底(1)上沉积由硬质材料层形成的层体系(S)的涂布方法，其包括下列方法步骤：提供可抽空的工艺室(2)，该工艺室具有含蒸发材料(M1)的阴极真空电弧蒸发源(Q1)和具有含放电材料(M2)的磁控放电源(Q2)，其中所述磁控放电源(Q2)可在HIPIMS模式下操作。随后仅利用阴极真空电弧蒸发源(Q1)在阴极真空电弧蒸发工艺中在基底(1)的表面上沉积至少一个包含所述蒸发材料(M1)的接触层(S1)。根据本发明，在沉积该接触层(S1)后，通过阴极真空电弧蒸发源(Q1)和磁控放电源(Q2)的平行操作，以纳米结构混合层形式，特别地以混合相中的纳米层中间层(S2)形式或以纳米复合层形式，沉积至少一个包含所述蒸发材料(MI)和所述放电材料(M2)的中间层(S2)。在此方面，所述磁控放电源(Q2)在HIPIMS模式下操作，和随后，仅利用磁控放电源(Q2)沉积至少一个包含所述材料(M2)的顶层(S3)，其中所述磁控放电源(Q2)在HIPIMS模式下操作。此外，本发明涉及具有层体系的基底。
摘要（英）：

The invention relates to a coating method for depositing a layer system (S) formed from hard material layers on a substrate (1), including the following method steps: Providing an evacuable process chamber having a cathodic arc evaporation source (Q1) with an evaporation material (M1) and having a magnetron discharge source (Q2) with a discharge material (M2), wherein the magnetron discharge source (Q2) can be operated in a HIPIMS mode. Subsequently depositing at least one contact layer (S1) including the evaporation material (M1) on the surface of the substrate (1) in a cathodic vacuum arc evaporation process only by means of the cathodic vacuum arc evaporation source (Q1). In accordance with the invention, after the depositing of the contact layer (S1), at least one intermediate layer (S2) is deposited in the form of a nanostructured mixed layer, in particular in the form of a nano-layer intermediate layer (S2) in a hybrid phase or as a nanocomposite layer, including the evaporation material (M1) and the discharge material (M2), by parallel operation of the cathodic vacuum arc evaporation source (Q1) and of the magnetron discharge source (Q2). In this respect, the magnetron discharge source (Q2) is operated in the HIPIMS mode and subsequently at least one top layer (S3) including the material (M2) is deposited only by means of the magnetron discharge source (Q2), with the magnetron discharge source (Q2) being operated in the HIPIMS mode. In addition, the invention relates to a substrate having a layer system.

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