The present invention is directed to a semiconductor device including a semiconductor chip formed with an SiC-IGBT including an SiC semiconductor layer, a first conductive-type collector region formed such that the collector region is exposed on a second surface of the SiC semiconductor layer, a second conductive-type base region formed such that the base region is in contact with the collector region, a first conductive-type channel region formed such that the channel region is in contact with the base region, a second conductive-type emitter region formed such that the emitter region is in contact with the channel region to define a portion of a first surface of the SiC semiconductor layer, a collector electrode connected to the collector region, and an emitter electrode connected to the emitter region, and a MOSFET including a second conductive-type source region electrically connected to the emitter electrode and a second conductive-type drain region electrically connected to the collector electrode, the MOSFET connected in parallel to the SiC-IGBT.