A micro-nano scale coupling vibration high-resolution measurement method is provided. The method based on an atomic force microscope (AFM) imaging technology is characterized by, to begin with, enabling a passivated AFM probe to contact with the smooth surface of a sample on a scanner, driving the scanner to drive the sample to perform X-axis-direction reciprocating scanning movement through a high-voltage driver, and utilizing a photoelectric detector to synchronously detect a Z-axis-direction deflection process of the AFM probe, so that micro-nano scale high-resolution measurement of Z-axis-direction coupling vibration of the scanner due to the X-axis-direction movement of the scanner is realized.