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发明公开
CN102034666A 等离子反应内室的侧部气体喷射器 失效 - 权利终止

等离子反应内室的侧部气体喷射器
摘要：
本发明涉及一种等离子反应内室的侧部气体喷射器。该侧部气体喷射器一块圆形均匀板和一块盖板。所述的圆形均匀板包括一个注入反应气体的喷射孔和一个分布反应气体的均匀通道部件，该均匀通道部件使从喷射孔进入的反应气体呈辐射状同时注入到均匀板的内圆周表面上多个位置处。所述的盖板与均匀板顶部相连，密封了均匀通道部件的顶部。
摘要（英）：

A side gas injector for a plasma reaction chamber is provided. The side gas injector includes a circular distribution plate and a cover plate. The circular distribution plate includes an injection hole for injecting a reaction gas and a distribution channel part for distributing the reaction gas such that the reaction gas introduced from the injection hole can be radially simultaneously jetted ina plurality of positions along an inner circumference surface of the distribution plate. The cover plate is coupled to a top of the distribution plate and seals a top of the distribution channel part.

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