The invention provides a short-flow preparation method of micro-sized spherical titanium powder, which belongs to the technical field of powder preparation. The hydrogenation-dehydrogenation technique and the radio frequency plasma body fusion spheroidization technique are integrated, and the titanium hydride powder is selected as raw material; the titanium hydride powder absorbs heat in the high-temperature plasma and quickly decomposes and dehydrogenates, and the titanium hydride power is cracked and crushed in the process of dehydrogenation to produce the micro-sized titanium powder. By using the method, the processes of the dehydrogenation and the spheroidization of the generated titanium powder are finished in one step directly through the plasma processing, and the short-flow preparation of the micro-sized spherical titanium powder is realized. The invention has the advantages that the hydrogenation-dehydrogenation technique and the radio frequency plasma fusion spheroidization technique are combined, so as to shorten the production flow, enhance the production efficiency and reduce the production cost. Simultaneously, the prepared spherical titanium power has fine and even particles, good liquidity, high sphericity and low oxygen content, thereby the requirements of technical industrial production such as the injection figuration, the gel die casting figuration, and thelike are satisfied.