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发明授权
CN101189772B 用于等离子体反应器的具有智能升降销机构的静电卡盘 失效 - 权利终止

用于等离子体反应器的具有智能升降销机构的静电卡盘
摘要：
用在对工件进行处理的反应器中的升降销组件包括大致平行于升降方向延伸的多个升降销。多个升降销的每个具有用于支撑工件的顶端和底端。升降台面向升降销的底端，并在大致平行于升降方向的方向上移动。小力检测器感测由升降销施加的力，该力足够大以指示所夹持的晶片，并且足够小以避免晶片脱离夹持。大力检测器感测在足以使晶片脱离夹持的范围中由升降销施加的力。
摘要（英）：

A lift pin assembly for use in a reactor for processing a workpiece includes plural lift pins extending generally parallel with a lift direction, each of the plural lift pins having a top end for supporting a workpiece and a bottom end. A lift table faces the bottom ends of the pins and is translatable in a direction generally parallel with the lift direction. A small force detector senses a force exerted by the lift pins that is sufficiently large to indicate a chucked wafer and sufficiently small to avoid dechucking a wafer. A large force detector senses a force exerted by the lift pins in a range sufficient to de-chuck the wafer.

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