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公开(公告)号:US20240347664A1
公开(公告)日:2024-10-17
申请号:US18300110
申请日:2023-04-13
IPC分类号: H01L31/107 , H01L27/144 , H01L31/02 , H01L31/0352
CPC分类号: H01L31/107 , H01L27/1446 , H01L31/02027 , H01L31/0352
摘要: The present disclosure relates to semiconductor structures and, more particularly, to single-photon avalanche diodes and methods of manufacture. The structure includes: a first deep trench structure in a semiconductor substrate having a conductive material and a material of a first polarity; a second deep trench structure in the semiconductor substrate surrounding the first deep trench structure, the second deep trench structure having a conductive material and a material of a second polarity; and contacts to both the first deep trench structure and the second deep trench structure.
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2.
公开(公告)号:US12113138B2
公开(公告)日:2024-10-08
申请号:US18194714
申请日:2023-04-03
IPC分类号: H01L31/02 , G02B3/06 , H01L27/146 , H01L31/0232 , H01L31/055 , H01L31/107 , H04N25/63
CPC分类号: H01L31/02027 , G02B3/06 , H01L27/14605 , H01L27/14621 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14643 , H01L27/14649 , H01L31/02327 , H01L31/055 , H01L31/107 , H01L27/1464 , H04N25/63
摘要: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. The light scattering structures may include a low-index material formed in trenches in the semiconductor substrate. One or more microlenses may focus light onto the semiconductor substrate. Areas of the semiconductor substrate that receive more light from the microlenses may have a higher density of light scattering structures to optimize light scattering while mitigating dark current.
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3.
公开(公告)号:US20240322061A1
公开(公告)日:2024-09-26
申请号:US18578226
申请日:2022-12-13
发明人: Zheng BIAN , Kui XIAO , Aifeng ZHAO , Jinjie HU , Tao YANG
IPC分类号: H01L31/107 , H01L27/144 , H01L31/0216 , H01L31/18
CPC分类号: H01L31/107 , H01L27/1443 , H01L28/20 , H01L31/02164 , H01L31/1804
摘要: The present disclosure relates to a single-photon avalanche diode integrated with a quenching resistor and a manufacturing method thereof. The method includes: obtaining a wafer; patterning and etching a front surface of the base to form a quenching resistor trench and an isolation trench, wherein a width of the isolation trench is greater than a width of the quenching resistor trench; forming an insulation layer on an inner surface of the quenching resistor trench; depositing polycrystalline silicon on the front surface of the base, where the polycrystalline silicon is filled into the quenching resistor trench and seals the quenching resistor trench while the polycrystalline silicon is filled into the isolation trench and does not seal the isolation trench; performing oxidation treatment on the polycrystalline silicon in the isolation trench; filling a light-shielding conductive material into the isolation trench.
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公开(公告)号:US20240314465A1
公开(公告)日:2024-09-19
申请号:US18677949
申请日:2024-05-30
申请人: PixArt Imaging Inc.
发明人: TSO-SHENG TSAI
IPC分类号: H04N25/75 , H01L27/146 , H01L31/107 , H04N25/76
CPC分类号: H04N25/75 , H01L27/14612 , H01L27/14643 , H04N25/76 , H01L31/107
摘要: There is provided an image sensor employing an avalanche diode. The image sensor includes a plurality of pixel circuits arranged in a matrix, a plurality of pulling circuits and a global current source circuit. Each of the plurality of pixel circuits includes a single photon avalanche diode (SPAD) and a floating diffusion. Each of the plurality of pulling circuits is arranged corresponding to one pixel circuit column. The global current source circuit is used to form a current mirror with each of the plurality of pulling circuits. The floating diffusion is used to record a voltage of one photon event detected by the SPAD in an exposure period.
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公开(公告)号:US12088941B2
公开(公告)日:2024-09-10
申请号:US18231435
申请日:2023-08-08
申请人: PixArt Imaging Inc.
发明人: Sen-Huang Huang , Tso-Sheng Tsai
IPC分类号: H04N25/75 , H01L27/146 , H01L31/107 , H04N25/76
CPC分类号: H04N25/75 , H01L27/14612 , H01L27/14643 , H04N25/76 , H01L31/107
摘要: There is provided an image sensor employing an avalanche diode. The image sensor includes a plurality of pixel circuits arranged in a matrix, a plurality of pulling circuits, a plurality of output circuits and a global current source circuit. Each of the plurality of pixel circuits includes a single photon avalanche diode and a P-type or N-type select switch transistor. Each of the plurality of pulling circuits is arranged corresponding to one pixel circuit column. The global current source circuit is used to form a current mirror with each of the plurality of pulling circuits. Each of the plurality of output circuits is shared by at least two pixel circuits.
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公开(公告)号:US12080813B2
公开(公告)日:2024-09-03
申请号:US17665885
申请日:2022-02-07
IPC分类号: H01L31/024 , H01L25/16 , H01L31/0203 , H01L31/107
CPC分类号: H01L31/024 , H01L25/165 , H01L25/167 , H01L31/0203 , H01L31/107
摘要: An optical semiconductor device includes a wiring board including a first surface and a second surface, a cover disposed to face the first surface, an optical semiconductor element disposed on the first surface, a plurality of electrodes disposed on the second surface, and a resist layer disposed on the second surface and located at least between the plurality of electrodes. A ventilation hole that penetrates the first surface and the second surface is formed in the wiring board. The second surface includes a disposition region in which the resist layer is disposed and a non-disposition region in which the resist layer is not disposed. The non-disposition region includes a first region in which the ventilation hole is disposed and a second region that reaches an edge of the second surface from the first region.
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7.
公开(公告)号:US12078720B2
公开(公告)日:2024-09-03
申请号:US16297320
申请日:2019-03-08
发明人: Anant Gupta , Atul Ingle , Andreas Velten , Mohit Gupta
IPC分类号: G01S17/10 , G01S7/484 , G01S7/486 , G01S17/89 , H01L31/107
CPC分类号: G01S17/10 , G01S7/484 , G01S7/4868 , G01S17/89 , H01L31/107
摘要: In accordance with some embodiments, systems, methods and media for single photon depth imaging with improved precision in ambient light conditions are provided. In some embodiments, the system comprises: a light source; a single photon detector; an attenuation element configured to provide a variable intensity attenuation factor; and a processor programmed to: (a)-determine an ambient light intensity associated with a scene point; (b)-select an attenuation factor based on the ambient light intensity; (c)-estimate a depth of the scene point based on a multiplicity of photon arrival times determined using the detector during a period of time during which light incident on the detector is attenuated by the selected attenuation factor and during which the light source is configured to periodically emit a pulse of light toward the scene point; (d)-repeat (a)-(c) for each of a multiplicity of scene points.
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公开(公告)号:US12062671B2
公开(公告)日:2024-08-13
申请号:US17349202
申请日:2021-06-16
发明人: Tzu-Jui Wang , Yuichiro Yamashita
IPC分类号: H01L27/146 , H01L31/107
CPC分类号: H01L27/1461 , H01L27/14607 , H01L27/1464 , H01L27/14683 , H01L31/107
摘要: The present disclosure relates to an image sensor including a pixel along a substrate. The pixel includes a first semiconductor region having a first doping type. A second semiconductor region is directly over the first semiconductor region. The second semiconductor region has a second doping type opposite the first doping type and meets the first semiconductor region at a p-n junction. A ring-shaped third semiconductor region laterally surrounds the first and second semiconductor regions. The ring-shaped third semiconductor region has the first doping type. A ring-shaped fourth semiconductor region laterally surrounds the ring-shaped third semiconductor region. The ring-shaped fourth semiconductor region has the second doping type. A ring-shaped fifth semiconductor region is directly over the ring-shaped third semiconductor region and has the second doping type.
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公开(公告)号:US20240243214A1
公开(公告)日:2024-07-18
申请号:US18156301
申请日:2023-01-18
发明人: Rajat SHARMA , Attila MEKIS , Gianlorenzo MASINI
IPC分类号: H01L31/107 , H01L31/0232
CPC分类号: H01L31/1075 , H01L31/02325 , H01L31/02327
摘要: A photodetector and method of making a photodetector are disclosed. An apparatus includes a semiconductor disk, a first doped region, and a first absorption region. The first doped region is disposed within the semiconductor disk such that the first doped region extends across a center of the semiconductor disk. The first doped region has a first doping type. The first absorption region is disposed on the first doped region such that a portion of the first doped region is positioned between the center of the semiconductor disk and the first absorption region along a radius of the semiconductor disk. The first absorption region includes a second doped region with a second doping type different from the first doping type. The first absorption region is arranged to absorb an optical signal as the optical signal travels along an inner circumference of the semiconductor disk.
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公开(公告)号:US20240243209A1
公开(公告)日:2024-07-18
申请号:US18623707
申请日:2024-04-01
申请人: Waymo LLC
发明人: Caner Onal , Simon Verghese , Pierre-Yves Droz
IPC分类号: H01L31/0352 , G01S7/486 , G01S7/4863 , G01S17/89 , H01L27/144 , H01L31/107 , H01L31/18
CPC分类号: H01L31/035272 , G01S17/89 , H01L27/1443 , H01L31/035281 , H01L31/107 , H01L31/186 , G01S7/4863 , G01S7/4868
摘要: Example embodiments relate to controlling detection time in photodetectors. An example embodiment includes a device. The device includes a substrate. The device also includes a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device. A depth of the substrate is at most 100 times a diffusion length of a minority carrier within the substrate so as to mitigate dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.
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