公开(公告)号：US07175969B1

公开(公告)日：2007-02-13

申请号：US11488588

申请日：2006-07-18

Applicant: Kevin B. Ray ,  Heidi M. Munnelly ,  Ting Tao ,  Kevin D. Wieland ,  Scott A. Beckley ,  Jianbing Huang

Inventor： Kevin B. Ray ,  Heidi M. Munnelly ,  Ting Tao ,  Kevin D. Wieland ,  Scott A. Beckley ,  Jianbing Huang

IPC: G03F7/028 ,  G03F7/033 ,  G03F7/034 ,  G03F7/085 ,  G03F7/14

CPC classification number: G03F7/0012 ,  B41C1/1008 ,  B41C1/1016 ,  B41C2201/02 ,  B41C2201/14 ,  B41C2210/04 ,  B41C2210/08 ,  B41C2210/22 ,  B41C2210/24 ,  B41C2210/266 ,  G03F7/027 ,  G03F7/033 ,  Y10S430/106 ,  Y10S430/11 ,  Y10S430/165

Abstract: A method of preparing negative-working, single-layer imageable elements improves their storage stability in a humid environment. The method includes enclosing the coated imageable elements in a water-impermeable sheet material that substantially inhibits the transfer of moisture to and from the imageable element. Such imageable elements include a radiation-sensitive composition that includes a radically polymerizable component, an initiator composition to provide radicals upon exposure to imaging radiation, a radiation absorbing compound, and a polymeric binder having poly(alkylene glycol) side chains.

Abstract translation: 制备负性，单层可成像元素的方法提高了其在潮湿环境中的储存稳定性。 该方法包括将涂覆的可成像元件封装在不透水的片材中，其基本上抑制湿气与可成像元件的转移。 这种可成像元件包括辐射敏感组合物，其包含可自由基聚合的组分，在暴露于成像辐射时提供自由基的引发剂组合物，辐射吸收化合物和具有聚（亚烷基二醇）侧链的聚合物粘合剂。

公开(公告)号：US06929897B2

公开(公告)日：2005-08-16

申请号：US10921488

申请日：2004-08-19

Applicant: Patrick Foster ,  Gregory Spaziano ,  Binod B De

Inventor： Patrick Foster ,  Gregory Spaziano ,  Binod B De

IPC: C08F24/00 ,  C08F30/08 ,  C08F220/18 ,  C08F222/06 ,  C08F230/08 ,  G03C1/76 ,  G03F20060101 ,  G03F7/004 ,  G03F7/039 ,  G03F7/075 ,  G03F7/09 ,  G03F7/20 ,  G03F7/30 ,  G03F7/36 ,  G03F7/034 ,  G08F24/00 ,  G08F30/08

CPC classification number: C08F220/18 ,  C08F222/06 ,  C08F230/08 ,  G03F7/0045 ,  G03F7/0758 ,  Y10S430/106 ,  Y10S430/108 ,  Y10S430/11 ,  Y10S430/111 ,  Y10S430/115 ,  Y10S430/122 ,  Y10S430/126

Abstract: Polymers and co-polymers having monomeric units formed by the polymerization of monomers of the Structure I where R1 is a moiety containing an ethylenically unsaturated polymerizable group, R2 is a C1-C3 alkylene group, and R3 is a C1-10 linear or cyclic alkyl group, a C6-10 aromatic or substituted aromatic group, a C1-8 alkoxy methyl, or a C1-8 alkoxy ethyl group, are useful as binder resins for photosensitive compositions, and processes for photolithography in the production of semiconductor devices and materials.

Abstract translation: 具有由结构I的单体聚合形成的单体单元的聚合物和共聚物，其中R 1是含有烯属不饱和可聚合基团的部分，R 2是C C 1 -C 3亚烷基，R 3是C 1-10烷基直链或环状的烷基， C 6-10芳族或取代的芳族基团，C 1-8烷氧基甲基或C 1-8烷氧基乙基， 可用作光敏组合物的粘合剂树脂，以及用于半导体器件和材料的制造中的光刻工艺。