-
公开(公告)号：US06627066B1
公开(公告)日：2003-09-30
申请号：US09830407
申请日：2001-04-27
申请人： Yasushi Isayama , Hiroyuki Ueyama , Hiroyuki Kaneko , Junitsu Yamakawa , Akihisa Hongo , Ryoichi Kimizuka , Megumi Maruyama
发明人： Yasushi Isayama , Hiroyuki Ueyama , Hiroyuki Kaneko , Junitsu Yamakawa , Akihisa Hongo , Ryoichi Kimizuka , Megumi Maruyama
IPC分类号： G01N2742
摘要： The concentration of a leveler in a plating liquid that is used by a plating apparatus for filling metal such as copper in interconnection trenches and holes defined in the surface of a semiconductor substrate or the like is determined based on a peak area (Ar value) in a peel-off region of the plating liquid measured according to a CV or CVS process.
摘要翻译： 基于在半导体衬底等的表面中限定的互连沟槽和孔中的用于填充铜等金属的电镀装置所使用的电镀液中的矫顽剂的浓度基于 根据CV或CVS工艺测量电镀液的剥离区域。
-
2.发明授权公开(公告)号：US06339334B1
公开(公告)日：2002-01-15
申请号：US09507460
申请日：2000-02-22
申请人： Su-moon Park , Jung-suk Yoo
发明人： Su-moon Park , Jung-suk Yoo
IPC分类号： G01N2742
CPC分类号： G01N27/416
摘要： An apparatus and method for measuring an electrochemical impedance at high speed. The method for measuring the electrochemical impedance of an electrolyte at high speed includes applying a direct current (DC) voltage having the reaction potential of the electrolyte to the electrolyte via a counter electrode and, after a delay, applying a signal voltage, including a DC voltage added to a differentiated or integrated Dirac-delta function voltage, to the electrolyte; computing a digital data value related only to the differentiated or integrated Dirac-delta function voltage, obtained by converting signal current flowing in a working electrode via the electrolyte into a voltage, integrating or differentiating the voltage, and Fourier transforming the result of the integration or differentiation; and obtaining changes in magnitude and phase as a function of frequency based on the Fourier transform, to compute the impedance. By investigating impedances computed at intervals upon the application of a reaction potential and upon the application of a step voltage plus the reaction potential to the electrolyte, the influence of mass transfer and electron transfer in the electrolyte on the impedance measurement can be understood.
摘要翻译： 用于高速测量电化学阻抗的装置和方法。 用于测量电解质在高速下的电化学阻抗的方法包括通过反电极将具有电解质的反应电位的直流（DC）电压施加到电解质上，并且在延迟之后施加包括DC的电压 电压加到差分或集成的狄拉克三角函数电压; 计算仅通过将在工作电极中经由电解质流动的信号电流转换成电压，积分或微分电压而获得的微分或积分狄拉克 - 三角函数电压的数字数据值，以及对积分的结果进行傅里叶变换， 分化 并且基于傅立叶变换获得作为频率的函数的幅度和相位的变化，以计算阻抗。 通过研究在施加反应电位时间隔计算的阻抗，并且当施加步进电压加上电解质的反应电位时，可以理解电解质中的传质和电子传递对阻抗测量的影响。
-
公开(公告)号：US06592747B2
公开(公告)日：2003-07-15
申请号：US09881817
申请日：2001-06-18
IPC分类号： G01N2742
CPC分类号： G01N31/164 , G01N27/42
摘要： Organic addition agents in copper plating baths are monitored by diluting a sample of the bath with sulfuric acid and hydrochloric acid and optionally a cupric salt. The diluting provides a bath having conventional concentrations of cupric ion, sulfuric acid and hydrochloric acid; and adjusted concentrations of the organic addition agents of 1/X of their original values in the sample; where X is the dilution factor. CVS techniques are used to determine concentrations of organic addition agents.
摘要翻译： 通过用硫酸和盐酸和任选的铜盐稀释浴的样品来监测铜电镀浴中的有机添加剂。 稀释液提供具有常规浓度的铜离子，硫酸和盐酸的浴液; 并将样品中原始值的1 / X的有机添加剂的浓度调节到其中; 其中X是稀释因子。 CVS技术用于确定有机添加剂的浓度。
-
公开(公告)号：US06215311B1
公开(公告)日：2001-04-10
申请号：US09211004
申请日：1998-12-15
申请人： Noboru Miyamoto , Kiyotaka Hoshino
发明人： Noboru Miyamoto , Kiyotaka Hoshino
IPC分类号： G01N2742
CPC分类号： H01M10/0413 , H01M2/34 , H01M10/48 , H01M2010/0495
摘要： A battery cell inspection method in which the difference in the measured value in case of normal battery cell insertion and that incase of mistaken battery cell insertion is large to facilitate decision as to whether or not mistaken insertion occurred to enable stable result of decision to be achieved, and in which, if the area of the electrode plate and/or the number of the electrode plates making up a sole battery cell is small, decision as to mistaken insertion can be given easily to assure correct results of decision. To this end, measurement is made of the difference between a measured value of the capacitance across a minus (−) electrode plate 103a of a first cell 101a and a (−) electrode plate 103b of a second cell 101b facing the (−) electrode plate 103a in case the potential across a plus (+) electrode plate 104a of the first cell 101a and a (+) terminal plate 102b of a second cell 101b neighboring to the first cell 101a is caused to fall to a ground potential (for an acceptable article) and a measured value of the capacitance across a minus (−) electrode plate 103a of the first cell 101a and a plus (+) terminal plate 102b of the second cell 101b neighboring to the minus (−) electrode plate 103a of a first cell 101a with a minus (−) electrode plate 103b of the second cell 101b incase the potential across the plus (+) terminal plate 102a of the first cell 101a and a minus (−) electrode plate 103b of the second cell 101b (for a reject).
摘要翻译： 一种电池单元检查方法，其中在正常的电池单元插入和错误的电池单元插入的情况下的测量值的差异大，以便于确定是否发生错误插入以使得能够实现稳定的决定结果 ，并且如果电极板的面积和/或构成唯一的电池单元的电极板的数量小，则可以容易地确定错误插入的判定以确保正确的判定结果。 为此，测量第一单元101a的负（ - ）电极板103a的电容的测量值与面向（ - ）电极的第二单元101b的（ - ）电极板103b之间的差异 在第一单元101a的正（+）电极板104a和与第一单元101a相邻的第二单元101b的（+）端子板102b上的电位降至接地电位（用于 第一单元101a的负（ - ）电极板103a的电容的测量值和邻近于（a）电极板103a的第二单元101b的正（+）端子板102b 具有第二单元101b的负极（ - ）电极板103b的第一单元101a在第一单元101a的正（+）端子板102a和第二单元101b的负极（+）电极板103b之间切断电位（用于 拒绝）。
-
5.发明授权公开(公告)号：US06592737B1
公开(公告)日：2003-07-15
申请号：US09690770
申请日：2000-10-17
申请人： Peter M. Robertson
发明人： Peter M. Robertson
IPC分类号： G01N2742
CPC分类号： G01N27/42 , G01N27/4161
摘要： An apparatus and method for the indirect determination of concentrations of additives in metal plating electrolyte solutions, particularly organic additives in Cu-metalization baths for semiconductor manufacturing. Plating potentials between the reference and test electrodes are measured and plotted for each of the solution mixtures, and data are extrapolated to determine the concentration of the additive in the sample. A multi-cycle method determines the concentration of both accelerator and suppressor organic additives in Cu plating solution in a single test suite.
摘要翻译： 用于间接测定金属电镀溶液中添加剂浓度的装置和方法，特别是用于半导体制造的Cu金属化浴中的有机添加剂。 对每个溶液混合物测量和绘制参考电极和测试电极之间的电位，并推断数据以确定样品中添加剂的浓度。 多循环方法确定单个试验套件中Cu电镀溶液中促进剂和抑制剂有机添加剂的浓度。
-
公开(公告)号：US06577134B2
公开(公告)日：2003-06-10
申请号：US10010936
申请日：2001-12-06
申请人： Guy J. Farruggia , Allan B. Fraser
发明人： Guy J. Farruggia , Allan B. Fraser
IPC分类号： G01N2742
摘要： Liquid conductivity and temperature are measured in respective sensitivity fields that are collocated—i. e., in volumes that nearly match by mathematical, geometrical, or functional criteria. Collocation is as distinct from mere adjacency or proximity; and is with respect to measurement volumes, not measuring hardware. Preferably pressure too is measured with sensitivity very generally collocated to the conductivity and temperature sensitivity. Preferably, respective temporal/spatial bandwidths of the two (or three) sensors are matched. Preferably the pressure sensor is a MEMS transducer, the conductivity sensor is a four-terminal device, the thermometer is a thermistor encapsulated in a silkscreened glass wall, and circuits (1) compensate for time lag between conductivity and temperature measurement, (2) remove artifacts due to detritus in or near either sensor, and (3) derive secondary parameters of the liquid.
-
公开(公告)号：US06827839B2
公开(公告)日：2004-12-07
申请号：US10002039
申请日：2001-11-02
申请人： Wade Sonnenberg , Mark J. Kapeckas , David L. Jacques , Raymond Cruz , Leon R. Barstad , Elie H. Najjar , Eugene N. Step , Robert A. Binstead
发明人： Wade Sonnenberg , Mark J. Kapeckas , David L. Jacques , Raymond Cruz , Leon R. Barstad , Elie H. Najjar , Eugene N. Step , Robert A. Binstead
IPC分类号： G01N2742
摘要： Disclosed are methods for determining the quantity of leveler in an electroplating bath in the presence of other organic additives, such as accelerators, brighteners and suppressors. Such methods are fast, work over a broad concentration range of components and can be performed in real-time.
摘要翻译： 公开了用于在存在其它有机添加剂如加速剂，增白剂和抑制剂的情况下确定电镀浴中的矫光机的量的方法。 这样的方法是快速的，在广泛的组分范围内工作，并且可以实时地执行。
-
公开(公告)号：US06527930B1
公开(公告)日：2003-03-04
申请号：US09598115
申请日：2000-06-21
IPC分类号： G01N2742
CPC分类号： G01N27/403
摘要： An ultramicroelectrode is disclosed which includes a) a silicon substrate; b) a silicon oxide insulating layer; c) a titanium adhesion layer; d) an iridium layer; e) a gold bond pad layer; f) a titanium adhesion layer; and g) a silicon dioxide insulating layer. In a preferred embodiment, the f) and g) layers have been partially or totally removed. Preferably, the ultramicroelectrode of the invention does not include mercury.
摘要翻译： 公开了一种超微电极，其包括：a）硅衬底; b）氧化硅绝缘层; c）钛粘合层; d）铱层; e）金焊垫层; f）钛粘合层; 和g）二氧化硅绝缘层。 在优选的实施方案中，f）和g）层已被部分或完全去除。 优选地，本发明的超微电极不包括汞。
-
公开(公告)号：US06417679B1
公开(公告)日：2002-07-09
申请号：US09669884
申请日：2000-09-27
申请人： Jörg Lenz
发明人： Jörg Lenz
IPC分类号： G01N2742
CPC分类号： G01N27/07
摘要： The invention relates to a conductivity sensor with a substantially circular cylindrical casing of synthetic material and with metal measuring electrodes in its planar substantially circular front wall, of which at least two voltage electrodes and at least two current electrodes form poles, wherein at least two substantially circular voltage electrodes are encompassed by at least two plane-form current electrodes extending substantially in a semicircle or by at least four substantially circular current electrodes disposed in two semicircles.
摘要翻译： 本发明涉及一种电导率传感器，其具有大致圆形的合成材料圆筒形壳体，并且在其平坦的基本圆形的前壁中具有金属测量电极，其中至少两个电压电极和至少两个电流电极形成极，其中至少两个基本上 环形电压电极由基本上以半圆形延伸的至少两个平面形状的电流电极或由设置在两个半圆中的至少四个基本上圆形的电流电极包围。
-
公开(公告)号：US06777943B2
公开(公告)日：2004-08-17
申请号：US10172098
申请日：2002-06-13
申请人： Peter Mortensen
发明人： Peter Mortensen
IPC分类号： G01N2742
摘要： A method and an apparatus for utilizing a periodic disconnection of a cathodic protection circuit, the voltage fluctuations caused on a cathodically protected structure by periodic disconnection of the protection circuit being detected in an apparatus and used for remote-controlled disconnection of a decoupling capacitor. Detection of periodically occurring negative-going voltage edges on a cathodically protected structure. The voltage supply of an apparatus through a capacitor or an electric circuit by means of a current transformer and a voltage outlet via a breaker.
摘要翻译： 一种用于利用阴极保护电路的周期性断开的方法和装置，通过在装置中周期性地断开被检测的并用于解耦电容器的远程控制断开的保护电路，在阴极保护结构上引起的电压波动。 检测阴极保护结构上周期性发生的负向电压边缘。 通过电流互感器和通过断路器的电压出口通过电容器或电路对设备进行电压供应。
-
-
-
-
-
-
-
-
-
搜索结果
14 条记录 (耗时 0.011 秒)
