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    Condenser system for high pressure processing system
    5.
    发明授权
    Condenser system for high pressure processing system 有权

    公开(公告)号：US11610773B2

    公开(公告)日：2023-03-21

    申请号：US16830420

    申请日：2020-03-26

    申请人： Applied Materials, Inc.

    发明人： Jean Delmas

    IPC分类号： B08B3/02 ,  H01L21/02 ,  H01L21/67 ,  F16T1/38 ,  F22B29/08

    摘要： Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.

    Condenser system for high pressure processing system
    6.
    发明授权
    Condenser system for high pressure processing system 有权

    公开(公告)号：US10685830B2

    公开(公告)日：2020-06-16

    申请号：US16183967

    申请日：2018-11-08

    申请人： Applied Materials, Inc.

    发明人： Jean Delmas

    IPC分类号： H01L21/02 ,  H01L21/67 ,  B08B3/02 ,  F16T1/38 ,  F22B29/08

    摘要： Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.