公开(公告)号：US20030141191A1

公开(公告)日：2003-07-31

申请号：US10062025

申请日：2002-01-31

Inventor： Herbert S. Kobayashi

IPC: C25D021/18 ,  B03B001/00 ,  B07B001/00

CPC classification number: B07B13/04 ,  E02F3/405 ,  E02F3/407 ,  E02F7/06 ,  Y10S37/901 ,  Y10S209/931

Abstract: Aggregate mixtures such as dirt, sand, rock, concrete, etc. are separated into piles according to size by continuous agitation of the mixture and by gravitational and centrifugal forces exerted thereon. A container for the material, such as the bucket of a backhoe, has the bottom thereof at least partially open. An adjustable, hydraulically-driven rotating disk attaches to and covers the open portion of the bottom of the container, the combination having a gap, or a selected spaced-apart relationship, between the stationary container and the rotating disk. The mixture is agitated by the rotating disk and by contact with the other particles in the container. Particles smaller than the selected gap distance are thrown out through the gap between the disk and the open portion of the container by centrifugal force. Material larger than the selected gap size remains in the container.

Abstract translation: 通过连续搅拌混合物和施加在其上的重力和离心力，根据尺寸将诸如污物，沙子，岩石，混凝土等的混合物分离成桩。 用于材料的容器，例如反铲铲斗的底部，其底部至少部分打开。 可调节的液压驱动的旋转盘连接并覆盖容器底部的开口部分，该组合在固定容器和旋转盘之间具有间隙或选定的间隔关系。 混合物由旋转盘搅动并与容器中的其它颗粒接触。 小于所选间隙距离的颗粒通过离心力通过盘与容器的开口部分之间的间隙被抛出。 大于所选间隙大小的材料保留在容器中。

公开(公告)号：US20010035353A1

公开(公告)日：2001-11-01

申请号：US09766662

申请日：2001-01-23

Inventor： Alfred H. Stiller

IPC: C25D021/18 ,  C01G057/00 ,  B01J039/00 ,  B01D015/04 ,  B01D011/04

CPC classification number: C25D21/22 ,  B01J49/50 ,  B01J49/60 ,  C25D21/18 ,  Y10S204/13 ,  Y10S210/912 ,  Y10S210/913

Abstract: A method is disclosed for treating a flushing solution from an ion exchanger used in electroplating operations by co-precipitating or selectively precipitating out metal hydroxides derived from metal ions from the structures being plated in the electroplating bath, metal ions from the electrodes use in the electroplating bath and metal ions from the plating metal used in the electroplating bath, and a pH raising agent having a cation with a valence of at least 2. After the metals are precipitated out of the flushing solution, the flushing solution is aerated with carbon dioxide to precipitate out the cation from the pH raising agent as a carbonate. The carbonate precipitate is removed from the flushing solution and the resulting solution consists essentially of water that may be recycled for use in the electroplating plant or safely discharged into the environment.

Abstract translation: 公开了一种用于从用于电镀操作的离子交换器处理冲洗溶液的方法，其通过共沉淀或选择性沉淀衍生自金属离子的金属氢氧化物，从被镀在电镀浴中的结构中去除金属离子，电极中使用的金属离子 来自电镀浴中使用的电镀金属的金属离子和金属离子，以及具有至少为2价的阳离子的pH提高剂。在将金属从冲洗溶液中沉淀出来之后，将冲洗溶液用二氧化碳充气 从作为碳酸盐的pH提高剂中析出阳离子。 从冲洗溶液中除去碳酸盐沉淀物，所得溶液基本上由水组成，可以再循环用于电镀设备或安全地排放到环境中。

公开(公告)号：US20020166772A1

公开(公告)日：2002-11-14

申请号：US10104127

申请日：2002-03-22

Applicant: Enthone Inc.

Inventor： Jan Jaques Marie Hendriks ,  Josephus Henricus Maria Weel

IPC: C25D021/18

CPC classification number: C25D21/22 ,  C25D21/12

Abstract: The present invention pertains to a method for the care and maintenance of an electrolyte, wherein the ion concentration and ion composition of the electrolyte are adjusted by means of an ion exchanger. Advantageously, the ion exchanger contains counterions that are contained in the electrolyte and that are relevant for the bath quality. For the exchange process, these counterions are exchanged with ions which negatively influence the bath quality from the electrolyte. Therefore, the composition of the electrolyte and the corresponding ion concentration are adjusted in an advantageous way. Therefore, e.g., the pH value of an electrolyte and its density can be held substantially constant, which considerably lengthens the lifetime of the electrolyte. By guaranteeing a substantially constant composition, the lifetime is no longer restricted. The extremely high effectiveness of the method according to the invention is dependent on these conditions.

Abstract translation: 本发明涉及一种电解液的保养和维护方法，其中通过离子交换器调节电解质的离子浓度和离子组成。 有利地，离子交换剂含有电解质中所含的抵抗离子，并且与浴质量相关。 对于交换过程，这些抗衡离子与离子交换，这些离子对电解液的浴质产生负面影响。 因此，以有利的方式调节电解质的组成和相应的离子浓度。 因此，例如电解质的pH值及其密度可以保持基本恒定，这显着延长了电解液的寿命。 通过保证基本上恒定的组成，寿命不再受限制。 根据本发明的方法的非常高的有效性取决于这些条件。

公开(公告)号：US20020033340A1

公开(公告)日：2002-03-21

申请号：US09882208

申请日：2001-06-13

Inventor： Robin Cheung ,  Daniel A. Carl ,  Liang-Yuh Chen ,  Yezdi Dordi ,  Paul F. Smith ,  Ratson Morad ,  Peter Hey ,  Ashok Sinha

IPC: C25D021/18 ,  C25D003/38

CPC classification number: C25D21/18 ,  C23C18/1617 ,  C23C18/1683 ,  C25D21/12

Abstract: An apparatus and method is provided for analyzing or conditioning an electrochemical bath. One aspect of the invention provides a method for analyzing an electrochemical bath in an electrochemical deposition process including providing a first electrochemical bath having a first bath composition, utilizing the first electrochemical bath in an electrochemical deposition process to form a second electrochemical bath having a second bath composition and analyzing the first and second compositions to identify one or more constituents generated in the electrochemical deposition process. Additive material having a composition that is substantially the same as all or at least some of the one or more constituents generated in the electrochemical deposition process may be added to another electrochemical bath to produce a desired chemical composition. The constituents may be added at the beginning of the use of the bath to initially condition the electrochemical bath or may be added, preferably either continuously or periodically, during the electrochemical deposition process.

Abstract translation: 提供了一种用于分析或调理电化学浴的装置和方法。 本发明的一个方面提供了一种用于在电化学沉积方法中分析电化学浴的方法，包括提供具有第一浴组成的第一电化学浴，利用电化学沉积工艺中的第一电化学浴形成具有第二浴的第二电化学浴 组合和分析第一和第二组合物以鉴定在电化学沉积过程中产生的一种或多种成分。 具有与在电化学沉积工艺中产生的一种或多种成分中的全部或至少一些基本上相同的组成的添加剂材料可以加入到另一电化学浴中以产生所需的化学组成。 可以在使用浴的开始时添加组分以最初调节电化学浴，或者可以在电化学沉积过程期间连续地或周期性地添加。

公开(公告)号：US20030159937A1

公开(公告)日：2003-08-28

申请号：US10085822

申请日：2002-02-27

Applicant: Applied Materials, Inc.

Inventor： Srinivas Gandikota ,  Chris R. McGuirk ,  Deenesh Padhi ,  Sivakami Ramanathan ,  Muhammad Atif Malik ,  Girish A. Dixit

IPC: C25D021/18

CPC classification number: C25D21/14 ,  C25D21/18

Abstract: Embodiments of the invention generally provide an apparatus and method for replenishing organic molecules in an electroplating bath. The replenishment process of the present invention may occur on a real-time basis, and therefore, the concentration of organics minimally varies from desired concentration levels. The replenishment method generally includes conducting pre-processing depletion measurements in order to determine organic depletion rates per current density applied in the electroplating system. Once the organic depletion rates per current density are determined, these depletion rates may be applied to an electroplating processing recipe to calculate the volume of organic depletion per recipe step. The calculated volume of organic depletion per recipe step may then be used to determine the volume of organic molecule replenishment per unit of time that is required per recipe step in order to maintain a desired concentration of organics in the plating solution. The calculated replenishment volume may then be added to the processing recipe so that the replenishment process may occur at real-time during processing periods. The apparatus generally includes a selectively actuated valve in communicaiton with a fluid delivery line, wherein the valve is configured to fluidly isolate a plating cell during a non-processing time period. The valve may be controlled by a system controller, and thus, the fluid level in the cell may be controlled during a non-processing time period.

Abstract translation: 本发明的实施方案通常提供用于在电镀浴中补充有机分子的装置和方法。 本发明的补充方法可以在实时的基础上进行，因此有机物的浓度最小化从期望的浓度水平变化。 补充方法通常包括进行预处理耗尽测量，以便确定在电镀系统中施加的每个电流密度的有机耗尽率。 一旦确定了每个电流密度的有机耗尽率，则这些耗尽率可以应用于电镀处理配方以计算每个配方步骤的有机耗尽量。 然后可以使用每个配方步骤的计算的有机耗尽体积来确定每个配方步骤所需的每单位时间的有机分子补充体积，以维持电镀溶液中所需的有机物浓度。 计算的补充量然后可以被添加到处理配方中，使得补货过程可以在处理时段期间实时发生。 该装置通常包括与流体输送管线通信的选择性致动的阀，其中阀被配置为在非处理时间段期间流体地隔离电镀槽。 阀可以由系统控制器控制，因此，可以在非处理时间段期间控制单元中的液位。

公开(公告)号：US20030042143A1

公开(公告)日：2003-03-06

申请号：US09944370

申请日：2001-09-04

Inventor： Colin John Dickinson ,  Ray Carnahan

IPC: C25D021/18 ,  F17D001/00 ,  E03B011/00

CPC classification number: C25D21/18 ,  Y10T137/4841

Abstract: A system for use with a plating cell configured to plate objects in a plating process. At least one byproduct is created in a plating substance used in the plating cell. The system includes a purification system configured to remove at least a portion of the at least one byproduct from the plating substance. The purification system comprises at least a first processing vessel, a second processing vessel, and a flow path providing flow from the first processing vessel to the second processing vessel. The flow path may be configured such that the flow from the first vessel to the second vessel is caused by gravity. A method is also provided for removing at least a portion of at least one byproduct from a plating substance used in a plating cell.

Abstract translation: 一种与电镀单元一起使用的系统，其被配置为在电镀过程中对对象进行平板化。 在电镀单元中使用的电镀物质中产生至少一种副产物。 该系统包括净化系统，该净化系统构造成从镀敷物质中除去至少一部分副产物。 净化系统包括至少第一处理容器，第二处理容器和提供从第一处理容器到第二处理容器的流动的流路。 流路可以被配置成使得从第一容器到第二容器的流由重力引起。 还提供一种用于从电镀池中使用的电镀物质中除去至少一部分至少一种副产物的方法。

公开(公告)号：US20020029974A1

公开(公告)日：2002-03-14

申请号：US09939502

申请日：2001-08-24

Applicant: Enthone Inc.

Inventor： Andreas Mobius ,  Axel Konig

IPC: C25D021/18 ,  B01D061/00 ,  B01D015/00

CPC classification number: C25D21/18 ,  C23C18/1617

Abstract: A method of purifying an electrolyte by bringing the electrolyte into contact with a first effective surface of a separating unit that is permeable to contaminants to be removed from the electrolyte, and bringing a purifying liquid into contact with a second effective surface of the separating unit. A concentration level of contaminants in the purifying liquid is maintained to maintain a contaminant driving force gradient between the electrolyte and the purifying liquid so contaminants transfer from the electrolyte into the purifying liquid. An apparatus for purifying an electrolyte having a first volumetric region for holding the electrolyte, a second volumetric region for holding a purifying liquid, and a separating unit that is permeable to the contaminants to be removed from the electrolyte and which fluidically separates the first and second volumetric regions.

Abstract translation: 一种通过使电解质与分离单元的第一有效表面接触以净化电解质的方法，所述分离单元的第一有效表面可渗透从电解质中除去的污染物，并使净化液与分离单元的第二有效表面接触。 保持净化液体中的污染物浓度水平以维持电解质和净化液体之间的污染物驱动力梯度，使得污染物从电解质转移到净化液中。 一种用于净化具有用于保持电解质的第一体积区域的电解质的设备，用于保持净化液体的第二容积区域和对待从电解质中除去的污染物可渗透的分离单元，并且将第一和第二 体积区域。

公开(公告)号：US20030150735A1

公开(公告)日：2003-08-14

申请号：US10292789

申请日：2002-11-12

Applicant: Kuntz Electroplating Inc.

Inventor： Peter Forth ,  Art Vibert ,  Madeline Busch ,  Sarah Stevenson ,  Hussain Al-Ekabi

IPC: C25D021/18

CPC classification number: C25D21/18

Abstract: A method and apparatus for treating an aqueous electroplating bath solution. The method comprises continuously agitating the solution; adjusting the pH of the solution, adjusting the temperature of the solution while adding an amount of hydrogen peroxide sufficient to promote dissolution of the hydrogen peroxide and generation of hydroxyl radicals; and adding an amount of an iron-containing compound so as to increase the rate of dissolution of the hydrogen peroxide to hydroxyl radicals so as to oxidize the organic compounds; whereby the total amount of organic carbon compounds in the solution is reduced. The apparatus comprises a treatment vessel, a pump for transferring a portion of the solution from the vessel to a mixing tank and for transferring a second portion of the solution to a heat exchanger for heating or cooling the second portion of the solution and a pump for transferring hydrogen peroxide to the vessel.

Abstract translation: 一种处理电镀水溶液的方法和装置。 该方法包括连续搅拌溶液; 调节溶液的pH，调节溶液的温度，同时加入足够量的过氧化氢以促进过氧化氢的溶解和产生羟基; 并加入一定量的含铁化合物，以增加过氧化氢溶解于羟基自由基以使氧化有机化合物; 从而降低溶液中有机碳化合物的总量。 该设备包括处理容器，用于将溶液的一部分从容器转移到混合罐并将溶液的第二部分转移到用于加热或冷却溶液的第二部分的热交换器的泵，以及用于 将过氧化氢转移到容器中。

公开(公告)号：US20020125142A1

公开(公告)日：2002-09-12

申请号：US10051611

申请日：2002-01-18

Inventor： Zhi-Wen Sun ,  Chunman Yu ,  Girish Dixit

IPC: C25D021/18 ,  B23H003/02 ,  C25C003/16 ,  C25C003/20

CPC classification number: C25D21/12 ,  G01N27/42 ,  G01N30/02 ,  G01N30/96 ,  B01D15/361

Abstract: Embodiments of the invention generally provide and apparatus and method for measuring organic additives in an ECP solution. The apparatus generally includes a high performance liquid chromatography (HPLC) column configured to receive an electrolyte fluid supply. The HPLC column operates to separate various organic additives from the electrolyte solution flowing therethrough. The remaining flow of electrolyte solution, which generally contains only a single organic additive therein, may then be passed to a CVS apparatus for analysis thereof. Inasmuch as the electrolyte flow contains only a single organic additive, the measurement accuracy is improved substantially. Further, a plurality of HPLC columns may be implemented to separate various organics out of the flowing electrolyte solution, and therefore, measure the flowing electrolyte solution for a plurality of organic additive concentrations therein.

Abstract translation: 本发明的实施方案一般提供了用于测量ECP溶液中的有机添加剂的装置和方法。 该装置通常包括构造成接收电解液供应的高效液相色谱（HPLC）柱。 HPLC柱用于从流过其中的电解质溶液中分离各种有机添加剂。 然后可以将通常仅含有其中单一有机添加剂的电解质溶液的剩余流动传递到CVS装置以进行分析。 由于电解质流仅含有单一的有机添加剂，所以测量精度大大提高。 此外，可以实施多个HPLC柱以从流动的电解质溶液中分离出各种有机物，因此，在其中测量流过的电解质溶液中的多种有机添加剂浓度。

公开(公告)号：US20010042688A1

公开(公告)日：2001-11-22

申请号：US09838321

申请日：2001-04-20

Applicant: MITSUI MINING & SMELTING CO., LTD.

Inventor： Kazuyoshi Nabekura ,  Yutaka Hirasawa ,  Naotomi Takahashi

IPC: C25D021/18

CPC classification number: B01D37/02

Abstract: The present invention provides a filtration method of copper electrolyte that can remove minute electrolytic by-products and dirt and may improve filtration efficiency by improving a conventional filtration method, the so-called precoating method. In a filtration method of copper electrolyte for removing electrolytic by-products and dirt which affect copper electrolysis, by passing copper electrolyte through a filter element precoated with a filtering aid, in the present invention, a precoated layer of a filtering aid is formed on a filter element in advance. Activated carbon preliminary treatment solution containing powdery activated carbon is passed through the filter element formed with the precoated layer, and is also circulated until no powdery activated carbon leaks from an outlet of the filter element, thus forming a powdery activated carbon layer on the precoated layer. Subsequently, the copper electrolyte is passed through for filtration.

Abstract translation: 本发明提供了一种铜电解质的过滤方法，其可以通过改进所谓的预涂法的常规过滤方法来去除微小的电解副产物和污垢并且可以提高过滤效率。 在用于除去影响铜电解的电解副产物和污垢的铜电解质的过滤方法中，通过使铜电解质通过预过滤助剂的过滤元件通过，在本发明中，过滤助剂的预涂层形成在 过滤元件。 含有粉末状活性炭的活性炭预处理溶液通过由预涂层形成的过滤元件，并且也循环直到没有粉状活性炭从过滤元件的出口泄漏，从而在预涂层上形成粉状活性炭层 。 随后，使铜电解液通过以进行过滤。