公开(公告)号：US06593431B2

公开(公告)日：2003-07-15

申请号：US10126287

申请日：2002-04-19

申请人： Michael T. Sheehan

发明人： Michael T. Sheehan

IPC分类号： C08F604

CPC分类号： C08F6/008 ,  C08F6/04 ,  C08F6/28 ,  C08L25/00

摘要： Polymers derived from 4-acyloxystyrene are purified by fractionalization plus heating and cooling of the polymers in alcoholic solvents.

公开(公告)号：US06787611B2

公开(公告)日：2004-09-07

申请号：US10373409

申请日：2003-02-24

申请人： Michael T. Sheehan

发明人： Michael T. Sheehan

IPC分类号： C08F604

CPC分类号： C08F6/02 ,  C08F6/008 ,  C08F6/04 ,  C08F6/28 ,  C08L25/18 ,  C08L25/00

摘要： Polymers derived from 4-acyloxystyrene are purified by fractionalization plus heating and cooling of the polymers in alcoholic solvents.

摘要翻译： 衍生自4-酰氧基苯乙烯的聚合物通过分馏加热和冷却聚合物在醇溶剂中进行纯化。

公开(公告)号：US06512087B1

公开(公告)日：2003-01-28

申请号：US09698724

申请日：2000-10-27

申请人： Stanley F. Wanat ,  M. Dalil Rahman ,  Zhong Xiang

发明人： Stanley F. Wanat ,  M. Dalil Rahman ,  Zhong Xiang

IPC分类号： C08F604

CPC分类号： C08G8/08 ,  C08G8/10 ,  G03F7/0236

摘要： Disclosed is a method for producing low molecular weight oligomers of a film forming resin, which involves: a) providing a solution of the film forming resin in a first solvent system comprising a photoresist solvent, and optionally a water-soluble organic solvent; b) providing a second solvent system comprising at least one substantially pure C5-C8 alkane and/or at least one aromatic compound having at least one hydrocarbyl substituent and/or water/C1-C4 alcohol mixture; and performing steps c)-e) in the following order: c) mixing the solutions from a) and second solvent system from b) in a static mixer for a time period sufficient for efficient mixing; d) feeding the mixture from c) and second solvent system from b) through two separate inlet ports into a liquid/liquid centrifuge, one of the inlet ports feeding the mixture from c), the second inlet port feeding the second solvent system from b) into said liquid/liquid centrifuge at a feed ratio of the mixture from c) to the second solvent system from b) of from about 10/90 to about 90/10, at a temperature of from about 0° C. up to maximum temperature that is less than the boiling point of the lowest boiling solvent in the first or second solvent system; e) rotating the mixture from step d) inside the liquid/liquid centrifuge at a rotational speed sufficient to separate the mixture from step d) into two separate phases, and then collecting the two separate phases, each from two separate outlet ports, into two separate containers, wherein the heavier phase (H) comprises a fractionated film forming resin comprising higher molecular weight fractions of the film forming resin and the lighter phase (L) comprises low molecular weight oligomers of the film forming resin. The present invention also provides a method for producing a photoresist composition, and method for producing a microelectronic device using the aforementioned fractionated resin or low molecular weight oligomers of the film forming resin.

公开(公告)号：US06297352B1

公开(公告)日：2001-10-02

申请号：US09597440

申请日：2000-06-20

申请人： Stanley F. Wanat ,  M. Dalil Rahman

发明人： Stanley F. Wanat ,  M. Dalil Rahman

IPC分类号： C08F604

CPC分类号： B01J45/00 ,  G03F7/0236

摘要： The present invention provides a method for reducing the metal ion content of a film-forming resin, said method comprising the steps of: a) providing a solution of the film-forming resin in a water-immiscible solvent system comprising at least one water-immiscible solvent; b) providing a washing solution comprising water or a dilute solution of a water-soluble metal ion chelating agent; c) feeding the solutions from a) and b) through two separate inlet ports into a liquid/liquid centrifuge, one of said inlet ports feeding solution from a), the second inlet port feeding the solution from b) into said liquid/liquid centrifuge at a feed rate ratio of the solution from a) to that from b) from about 10/90 to about 90/10, at a temperature of from about 0° C. up to a maximum temperature that is less than the boiling point of the lowest boiling water-immiscible solvent in the water-immiscible solvent system; and d) rotating the mixture from step c) inside said liquid/liquid centrifuge at a rotational speed sufficient to separate the mixture from step c) into two separate phases, and then collecting the two separate phases, each through a separate outlet port, into two separate containers, wherein the heavier phase (H) comprises the film-forming resin having a reduced metal ion content in the water-immiscible solvent system, with a minor amount of water; and the lighter phase (L) comprises: 1) an aqueous solution of metal ions and a minor amount of a mixture of 2) the water-immiscible solvent system, and 3) the film-forming resin. The present invention also provides for a method for producing a photoresist composition and a method for producing a microelectronic device utilizing a film-forming resin produced by the aforementioned method.

摘要翻译： 本发明提供了一种降低成膜树脂的金属离子含量的方法，所述方法包括以下步骤：a）将成膜树脂的溶液提供在与水不混溶的溶剂体系中，该溶液体系包含至少一种水 - 不混溶溶剂; b）提供包含水或水溶性金属离子螯合剂的稀溶液的洗涤溶液; c）将来自a）和b）的溶液通过两个单独的入口端口进入液体/液体离心机，所述入口端口中的一个从a）供给溶液，将来自b）的溶液供给到所述液体/液体离心机 以a）至b）的溶液的进料速率比为约10/90至约90/10，温度为约0℃至最低温度为低于 与水不混溶的溶剂体系中最低沸水不溶混溶剂; 以及d）将所述液体/液体离心机内的步骤c）中的混合物以足以将混合物从步骤c）分离成两个分开的相的旋转速度旋转，然后通过单独的出口端收集两个分离的相， 两个单独的容器，其中较重的相（H）包括在与水不混溶的溶剂体系中具有降低的金属离子含量的成膜树脂，少量的水; 轻相（L）包括：1）金属离子的水溶液和少量的2）水不混溶溶剂体系的混合物，和3）成膜树脂。 本发明还提供一种光致抗蚀剂组合物的制造方法和利用上述方法制造的成膜树脂的微电子器件的制造方法。