FLOW METROLOGY CALIBRATION FOR IMPROVED PROCESSING CHAMBER MATCHING IN SUBSTRATE PROCESSING SYSTEMS

    公开(公告)号:US20240255341A1

    公开(公告)日:2024-08-01

    申请号:US18631708

    申请日:2024-04-10

    摘要: A method for calibrating a gas flow metrology system for a substrate processing system includes a) measuring temperature using a first temperature sensor and a reference temperature sensor over a predetermined temperature range and determining a first transfer function; b) measuring pressure using a first pressure sensor and a reference pressure sensor over a predetermined pressure range using a first calibration gas and determining a second transfer function; c) performing a first plurality of flow rate measurements in a predetermined flow rate range with a first metrology system and a reference metrology system, wherein the first metrology system and the reference metrology system use a first orifice size and the first calibration gas; and d) scaling temperature and pressure using the first transfer function and the second transfer function, respectively, and determining a corresponding transfer function for the first calibration gas based on the first plurality of flow rate measurements.

    Flow metrology calibration for improved processing chamber matching in substrate processing systems

    公开(公告)号:US11959793B2

    公开(公告)日:2024-04-16

    申请号:US17641240

    申请日:2020-09-10

    摘要: A method for calibrating a gas flow metrology system for a substrate processing system includes a) measuring temperature using a first temperature sensor and a reference temperature sensor over a predetermined temperature range and determining a first transfer function; b) measuring pressure using a first pressure sensor and a reference pressure sensor over a predetermined pressure range using a first calibration gas and determining a second transfer function; c) performing a first plurality of flow rate measurements in a predetermined flow rate range with a first metrology system and a reference metrology system, wherein the first metrology system and the reference metrology system use a first orifice size and the first calibration gas; and d) scaling temperature and pressure using the first transfer function and the second transfer function, respectively, and determining a corresponding transfer function for the first calibration gas based on the first plurality of flow rate measurements.

    Electronic apparatus and controlling method using corrected sensor values

    公开(公告)号:US12072718B2

    公开(公告)日:2024-08-27

    申请号:US16994489

    申请日:2020-08-14

    摘要: A method of controlling an electronic apparatus is provided. The method includes the steps of receiving measurement values for the state of air displayed on a plurality of external electronic apparatuses from each of the plurality of external apparatuses, calculating rates of change of the measurement values for each of the plurality of external electronic apparatuses based on the received measurement values, identifying external electronic apparatuses of which differences of the calculated rates of change belong to a predetermined range among the plurality of external electronic apparatuses, correcting the measurement values received from at least one external electronic apparatus among the identified external electronic apparatuses such that the measurement values received from the identified external electronic apparatuses become the same as one another, and transmitting information related to the corrected measurement values to the at least one external electronic apparatus.

    METHODS AND SYSTEMS FOR ENERGY MEASURING BASED ON NATURAL GAS DATA OF SMART GAS METER

    公开(公告)号:US20240133731A1

    公开(公告)日:2024-04-25

    申请号:US18398416

    申请日:2023-12-28

    摘要: The embodiments of the present disclosure provide methods and systems for energy measuring based on natural gas data of a smart gas meter, including establishing the gas IoT. The object platform obtains consumed gas volume data and location data of the smart gas meter as first data and second data, and sending them to the management platform through the sensor network platform. The management platform generates consumed gas preprocessing data based on the first data and the second data, and generates energy measurement data after performing the computation outside the gas IoT on the consumed gas preprocessing data by the cloud platform outside the gas IoT. The management platform sends the energy measurement data to the user platform configured in a regional pipeline network center through the service platform. The user platform performs gas energy measurement of the smart gas meter based on the energy measurement data.

    Detection of low gas pressure without pressure sensors

    公开(公告)号:US11867542B2

    公开(公告)日:2024-01-09

    申请号:US17127809

    申请日:2020-12-18

    申请人: Itron, Inc.

    摘要: Techniques detect a low gas-pressure condition within a region without the use of pressure sensors. In an example, gas usage at a service site is disaggregated to show use by individual appliances. A flowrate of gas at an appliance (e.g., a gas hot water tank) having a generally fixed-rate of gas-consumption is determined. Based at least in part on the flowrate of gas at the appliance, and an historical gas flowrate at that appliance, it is determined if gas pressure at the service site is lower than expected. In an example, failure of the appliance to use its typical fixed-flowrate may indicate low gas pressure at the service site. Information is obtained from a second gas meter at a second service site. Based on the gas pressure at the first and second service sites being lower than expected, a low gas pressure situation may exist in a regional area.

    Portable verification system and method for use in verifying a gas pipeline flow meter when in field

    公开(公告)号:US11692863B2

    公开(公告)日:2023-07-04

    申请号:US17466651

    申请日:2021-09-03

    发明人: Dennis McClintock

    摘要: Embodiments of a portable verification system can move from one in-field gas flow meter location to another and temporarily connect downstream of a main pipeline's meter run or station. A control valve of the portable verification system allows volume measurement at different flow velocities to be verified. In some embodiments, the portable verification system is connected to the meter run and the main pipeline by an adjustable pipeline section. This section can extend horizontally and vertically, as well as swivel to provide versatility when connecting in the field. Adaptor fittings having one flange sized for and fitted to the inlet and outlet ends of the portable verification system and another flange sized for the meter run or main pipeline connection provide additional versatility. Downtime is limited to the time required to complete a circuit between the meter run, portable verification system, and main pipeline.

    METHODS AND SYSTEMS FOR SAFETY CONTROL OF GAS PRESSURE REGULATOR CABINET BASED ON REGULATORY IOT

    公开(公告)号:US20240310008A1

    公开(公告)日:2024-09-19

    申请号:US18670691

    申请日:2024-05-21

    IPC分类号: F17D5/06 G01F25/10

    CPC分类号: F17D5/06 G01F25/15

    摘要: The present disclosure provides a method and system for safety control of gas pressure regulator cabinet based on regulatory Internet of Things (IoT). The method may include: determining accident warning information based on light data, air data, and inspection information, sending the accident warning information to a government safety regulatory management platform, and obtaining feedback information from the government safety regulatory management platform; and determining a power use strategy based on power supply information, power storage module information, and power use information of at least one gas pressure regulator cabinet, and sending the power use strategy to the at least one gas pressure regulator cabinet. The system may include: a government safety regulatory service platform, a government safety regulatory management platform, a government safety regulatory sensor network platform, a gas company management platform, a gas company sensor network platform, and a gas device object platform.

    Abnormality detection method for flow rate control device, and flow rate monitoring method

    公开(公告)号:US11988543B2

    公开(公告)日:2024-05-21

    申请号:US17755966

    申请日:2020-11-26

    IPC分类号: G01F25/10 G01F1/36 G05D7/06

    CPC分类号: G01F25/15 G01F1/36 G05D7/0635

    摘要: An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.