-
公开(公告)号：US10724941B2
公开(公告)日：2020-07-28
申请号：US16073159
申请日：2017-02-07
发明人： Akira Watanabe , Bunpei Doi
IPC分类号： G01N21/01 , G01N21/3577 , G01N21/3586 , G01N1/28 , G01N21/05 , B01D69/00 , B05B1/26
摘要： A liquid membrane 100 is formed by jetting a liquid sucked from a recovery reservoir 11a and pressurized using a pump 12 from a nozzle of a liquid membrane cartridge 20. The formed liquid membrane 100 makes contact with a slope wall of the liquid membrane cartridge 20 along a surface of the liquid membrane 100. The liquid running down from the slope wall is recovered and stored in the recovery reservoir 11a in order to recover the liquid running down along the slope wall in a decelerated state into the recovery reservoir 11a. As a result, it is possible to prevent air bubbles from being generated by agitation of a liquid of the recovery reservoir 11a when the liquid enters the recovery reservoir 11a.
-
公开(公告)号：US11181474B2
公开(公告)日：2021-11-23
申请号：US16467301
申请日：2017-12-11
发明人： Akira Watanabe , Tadashi Okuno , Takeji Ueda
IPC分类号： G01N21/3581 , G01N21/3577 , G06K9/00 , G01R23/16
摘要： A terahertz wave signal analysis device includes a fitting processing unit 13 that fits synthetic waveforms of a plurality of normal distribution functions which differ in at least one of a center frequency, an amplitude, and a width to a frequency spectrum obtained from a terahertz wave signal and a graph generating unit 14 that generates a graph using at least one of a center frequency, an amplitude, and a width of a plurality of normal distribution functions used in the fitting as parameters, and it is possible to visualize a feature corresponding to a characteristic of a sample in the form of a graph in an easy-to-understand manner by approximating a frequency spectrum which does not clearly appear because a difference in the characteristic of the sample becomes a feature of a waveform by synthetic waveforms of a plurality of normal distribution functions in a form in which the characteristic of the sample is taken over and generating a graph on the basis of parameters of a plurality of normal distribution functions used in the approximation.
-
公开(公告)号：US10352849B2
公开(公告)日：2019-07-16
申请号：US16094133
申请日：2017-07-21
发明人： Akira Watanabe , Tadashi Okuno , Takeji Ueda
IPC分类号： G01N21/35 , G01N21/3586 , G01N21/3577
摘要： A terahertz wave is spectrally dispersed into two waves which are caused to pass through a sample liquid film 101 and a reference liquid film 102 and are then collected, and the terahertz waves in an interference state are detected by a terahertz wave detecting semiconductor 15. Consequently, only spectroscopic information related to a distinctive characteristic of the sample liquid film 101 is detected. In addition, a predetermined optical path length difference is provided between a path where the terahertz wave is transmitted through the sample liquid film 101 and a path where the terahertz wave is transmitted through the reference liquid film 102 by an optical delaying unit 17. Ina frequency spectrum obtained by performing Fourier transformation over a terahertz wave signal having an interference waveform by a terahertz wave signal analyzing device 20, consequently, a feature caused by an interaction of dissimilar molecules in the sample liquid film 101 appears in a spectral intensity at a frequency depending on the optical path length difference.
-
公开(公告)号：US12072285B2
公开(公告)日：2024-08-27
申请号：US17770394
申请日：2021-04-01
发明人： Akira Watanabe , Tadashi Okuno , Takeji Ueda
IPC分类号： G01N21/3586 , G01N21/03 , G01N21/27
CPC分类号： G01N21/3586 , G01N21/03 , G01N21/274 , G01N2021/0307
摘要： The invention is configured to include a spectroscopy cell 100 as a container including one or more spaces, each of which has a plate shape and contains a to-be-measured object that transmits or reflects a terahertz wave; and a holder 6 including one or more first holder through-holes 6b and 6c disposed at positions corresponding to the spaces of the spectroscopy cell 100, each of the spaces containing the to-be-measured object. A body portion 1 of the spectroscopy cell 100 is made of a resin material that transmits the terahertz wave, and the spectroscopy cell 100 is loaded into the holder 6 and is used. The holder 6 has a function of holding the spectroscopy cell 100, and a function of correcting one or more of a distortion, a twist, and a bending of the spectroscopy cell 100.
-
公开(公告)号：US20220128463A1
公开(公告)日：2022-04-28
申请号：US17437920
申请日：2020-10-08
发明人： Akira WATANABE , Tadashi OKUNO , Takeji UEDA
IPC分类号： G01N21/3577 , G01N21/3581
摘要： An electromagnetic signal analysis apparatus includes a frequency spectrum obtaining unit 11 to obtain a frequency spectrum that is generated based on an electromagnetic signal obtained by a spectral device 20 and represents a property value with respect to a frequency, a water vapor fitting processing unit 12 to fit a waveform of a single fitting function or a composite waveform, of a plurality of fitting functions to a frequency spectrum at a frequency at which absorption of the electromagnetic waves by water vapor is increased, and a property analyzing unit 14 to analyze a property of a liquid sample using at least two values that determine a characteristic of the fitting function used for the fitting, so that the frequency spectrum, at the frequency at which absorption of the electromagnetic waves by water vapor generated from surfaces of the liquid sample is increased is processed to analyze the property of the liquid sample.
-
公开(公告)号：US10295461B2
公开(公告)日：2019-05-21
申请号：US15758946
申请日：2016-10-18
发明人： Akira Watanabe , Takeji Ueda , Tadashi Okuno
IPC分类号： G01J5/02 , G01N21/3586 , G01J3/42 , G01N21/3577 , G01N21/3581
摘要： There are provided a terahertz wave spectral dispersing unit 13 for spectrally dispersing a terahertz wave to be generated from a terahertz wave generating semiconductor 12 into two waves, a terahertz wave focusing unit 14 for focusing a terahertz wave transmitted through a sample liquid film 101 and a terahertz wave transmitted through a reference liquid film 102, and a terahertz wave detecting semiconductor 15 for detecting the focused terahertz wave, and it is possible to detect the terahertz wave transmitted through the sample liquid film 101 and the terahertz wave transmitted through the reference liquid film 102 in an interference state, thereby offsetting a noise made by a stripe-shaped wave generated on the sample liquid film 101 and a noise made by a stripe-shaped wave generated on the reference liquid film 102.
-
公开(公告)号：US20220390364A1
公开(公告)日：2022-12-08
申请号：US17770394
申请日：2021-04-01
发明人： Akira WATANABE , Tadashi OKUNO , Takeji UEDA
IPC分类号： G01N21/3586 , G01N21/03 , G01N21/27
摘要： The invention is configured to include a spectroscopy cell 100 as a container including one or more spaces, each of which has a plate shape and contains a to-be-measured object that transmits or reflects a terahertz wave; and a holder 6 including one or more first holder through-holes 6b and 6c disposed at positions corresponding to the spaces of the spectroscopy cell 100, each of the spaces containing the to-be-measured object. A body portion 1 of the spectroscopy cell 100 is made of a resin material that transmits the terahertz wave, and the spectroscopy cell 100 is loaded into the holder 6 and is used. The holder 6 has a function of holding the spectroscopy cell 100, and a function of correcting one or more of a distortion, a twist, and a bending of the spectroscopy cell 100.
-
公开(公告)号：US20240102927A1
公开(公告)日：2024-03-28
申请号：US17768302
申请日：2020-09-28
发明人： Akira WATANABE , Tadashi OKUNO , Takeji UEDA
IPC分类号： G01N21/3586 , G01N21/95 , G03F7/40 , H01L21/66
CPC分类号： G01N21/3586 , G01N21/9501 , G03F7/40 , H01L22/10 , G01N2021/8427
摘要： A terahertz-wave signal input unit 11 configured to input a terahertz-wave signal from a spectroscopic apparatus 200 for detecting a terahertz wave acting on a photoresist, and a terahertz-wave signal analysis unit 12 configured to analyze a terahertz-wave signal input by the terahertz-wave signal input unit 11 to acquire characteristic information of the photoresist are included, and spectroscopic processing using a terahertz wave is performed on a photoresist to acquire characteristic information of the photoresist (a characteristic value or a correlation characteristic indicating a relationship between a plurality of elements including the characteristic value). Even though the characteristics of the photoresist change depending on the light, since the characteristic change is not caused by the terahertz wave, it is possible to acquire characteristic information of the photoresist without changing the characteristics of the photoresist, and to properly evaluate the characteristics of the photoresist from the characteristic information.
-
公开(公告)号：US11680896B2
公开(公告)日：2023-06-20
申请号：US17437920
申请日：2020-10-08
发明人： Akira Watanabe , Tadashi Okuno , Takeji Ueda
IPC分类号： G01N21/3577 , G01N21/3581
CPC分类号： G01N21/3577 , G01N21/3581
摘要： An electromagnetic signal analysis apparatus includes a frequency spectrum obtaining unit 11 to obtain a frequency spectrum that is generated based on an electromagnetic signal obtained by a spectral device 20 and represents a property value with respect to a frequency, a water vapor fitting processing unit 12 to fit a waveform of a single fitting function or a composite waveform, of a plurality of fitting functions to a frequency spectrum at a frequency at which absorption of the electromagnetic waves by water vapor is increased, and a property analyzing unit 14 to analyze a property of a liquid sample using at least two values that determine a characteristic of the fitting function used for the fitting, so that the frequency spectrum, at the frequency at which absorption of the electromagnetic waves by water vapor generated from surfaces of the liquid sample is increased is processed to analyze the property of the liquid sample.
-
公开(公告)号：US20210201140A1
公开(公告)日：2021-07-01
申请号：US17058691
申请日：2018-08-06
发明人： Akira WATANABE , Tadashi OKUNO , Takeji UEDA
IPC分类号： G06N3/08 , G01N21/3581
摘要： A learning model creation unit 12A that creates a learning model using parameters of a plurality of fitting functions corresponding to a generation source of a composite waveform fit to a frequency spectrum obtained by spectroscopic measurement of a terahertz wave, and a sample information prediction unit 22A that applies a parameter obtained for a sample to be predicted to the learning mode thereby predicting information about the sample to be predicted are included, and the information about the sample to be predicted can be more accurately predicted using a learning model in which a feature quantity representing a property of a sample is reflected as the parameters of the plurality of fitting functions corresponding to the generation source of the composite waveform fit to the frequency spectrum.
-
-
-
-
-
-
-
-
-
搜索结果
10 条记录 (耗时 0.012 秒)
