公开(公告)号：US5066128A

公开(公告)日：1991-11-19

申请号：US499798

申请日：1990-03-27

Applicant: Zhuo-Jun Lu

Inventor： Zhuo-Jun Lu

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0253

Abstract: The interferometer is fed by a laser whose wavelength is modulated. The frequency of the optical fringes generated by modulating the wavelength of the laser are measured. Preferably, the measurement of the frequency is carried out by counting pulses. A system for carrying out the method includes a pulse counter circuit.

Abstract translation: 干涉仪由其波长被调制的激光器馈送。 测量通过调制激光波长产生的光边的频率。 优选地，通过计数脉冲来进行频率的测量。 用于执行该方法的系统包括脉冲计数器电路。

公开(公告)号：US5096296A

公开(公告)日：1992-03-17

申请号：US557617

申请日：1990-07-24

Applicant: Zhuo-Jun Lu

Inventor： Zhuo-Jun Lu

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/39

CPC classification number: G01B9/02007 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/02078 ,  G01J9/02 ,  G01B2290/60 ,  G01N2021/399

Abstract: A characteristic matrix S(j,i) of the system is preformed such that each row j is preformed at a predetermined constant optical path difference. Light from a laser is transmitted through the system at n different laser wavelengths, and a different datum is obtained at each wavelength whereby to obtain a set of n different data. A vector is formed from the n different data, and the characteristic matrix is multiplied by the vector to obtain a correlation vector. The maximum amplitude element of the correlation vector points to the row of a matrix which has the greatest correlation with the obtained data, so that the predetermined optical path difference of that row indicates the phase of the interferometer of the system. In a separate embodiment, the data vector is divided by the characteristic matrix to obtain a second matrix, and the second matrix is used to form an absolute deviation vector. In this method, the minimum value of the vector points to the row of the characteristic matrix which has least absolute deviation from the obtained data than any other one of the rows so that the predetermined optical path difference of this row is indicative of the phase of the interferometer. In a third embodiment, two sets of data are obtained at two different wavelengths whereby to obtain the optical path difference of the interferometer without ambiguity.

Abstract translation: 执行系统的特征矩阵S（j，i），使得每行j以预定的恒定光程差进行。 来自激光的光通过系统以不同的激光波长传输，并且在每个波长处获得不同的数据，从而获得一组n个不同的数据。 从n个不同的数据形成向量，并将特征矩阵乘以向量以获得相关向量。 相关矢量的最大振幅元素指向与获得的数据具有最大相关性的矩阵行，使得该行的预定光程差表示系统的干涉仪的相位。 在单独的实施例中，数据向量被特征矩阵除以获得第二矩阵，并且第二矩阵用于形成绝对偏差向量。 在该方法中，矢量的最小值指向特征矩阵的行，该特征矩阵的行与获得的数据的绝对偏差与行中的任一行绝对偏离，使得该行的预定光程差表示相位 干涉仪。 在第三实施例中，在两个不同波长处获得两组数据，从而获得干涉仪的光程差，而不含歧义。