公开(公告)号：US12130554B2

公开(公告)日：2024-10-29

申请号：US18404934

申请日：2024-01-05

申请人： ZHEJIANG LAB ,  ZHEJIANG UNIVERSITY

发明人： Cuifang Kuang ,  Hongqing Wang ,  Ziang Wang ,  Zhenyao Yang ,  Mengbo Tang ,  Lanxin Zhan ,  Xiaoyi Zhang ,  Jisen Wen ,  Xu Liu

IPC分类号： G03F7/20 ,  G03F7/00

CPC分类号： G03F7/2053 ,  G03F7/70391 ,  G03F7/704

摘要： A method and an apparatus for direct writing photoetching by parallel interpenetrating super-resolution high-speed laser. The method of the present application uses a parallel interpenetrating algorithm. Firstly, a multi-beam solid light spot for writing is generated based on a writing light spatial light modulator; a multi-beam hollow light spot for inhibition is generated based on an inhibition optical spatial light modulator; the multi-beam solid light spot is combined with the multi-beam hollow light spot to generate a modulated multi-beam light spot; a writing waveform is output based on a multichannel acousto-optic modulator, a displacement stage moves at a constant speed until writing of a whole column of areas is completed, an optical switch is turned off, and the displacement stage conducts one-time stepping movement; the process is not stopped until all patterns are written.