Method for manufacturing information recording medium
    2.
    发明授权
    Method for manufacturing information recording medium 失效
    信息记录介质的制造方法

    公开(公告)号:US4395435A

    公开(公告)日:1983-07-26

    申请号:US355114

    申请日:1982-03-05

    IPC分类号: C23C16/00 G11B9/06

    摘要: An information recording medium is manufactured while placing, in a reaction region, a substrate on the surface of which is recorded information in the form of an indented pattern and the surface of which exhibits electrical conductivity. A plasma generating gas is introduced into a plasma generating region which is isolated from the reaction region. The plasma generating gas is activated by microwaves to generate a plasma. The plasma from the plasma generating region and an organic monomer are introduced into the reaction region independently of each other to initiate polymerization of the organic monomer. A dielectric layer of a polymer of the monomer and of a uniform, small thickness is formed along the indented pattern of the target.

    摘要翻译: 制造信息记录介质,在反应区域中,将其表面上记录的基板以缩进图案的形式记录的信息放置在表面上,并且其表面具有导电性。 将等离子体产生气体引入从反应区域分离的等离子体产生区域中。 等离子体产生气体由微波激活以产生等离子体。 将来自等离子体产生区域和有机单体的等离子体彼此独立地引入反应区域以引发有机单体的聚合。 沿着目标的缩进图案形成单体的聚合物的介电层,并且具有均匀的小厚度。