Gallium Nitride Semiconductor and Method of Manufacturing the Same
    2.
    发明申请
    Gallium Nitride Semiconductor and Method of Manufacturing the Same 审中-公开
    氮化镓半导体及其制造方法

    公开(公告)号:US20080290347A1

    公开(公告)日:2008-11-27

    申请号:US12124080

    申请日:2008-05-20

    Abstract: The present invention provides to a gallium nitride (GaN) semiconductor and a method of manufacturing the same, capable of reducing crystal defects caused by a difference in lattice parameters, and minimizing internal residual stress. In particular, since a high-quality GaN thin film is formed on a silicon wafer, manufacturing costs can be reduced by securing high-quality wafers with a large diameter at a low price, and applicability to a variety of devices and circuit can also be improved.

    Abstract translation: 本发明提供一种氮化镓(GaN)半导体及其制造方法,其能够减少由晶格参数的差异引起的晶体缺陷,并使内部残余应力最小化。 特别地,由于在硅晶片上形成高质量的GaN薄膜,所以可以通过以较低的价格确保大直径的高品质晶片来降低制造成本,并且适用于各种器件和电路也可以 改进。

    Method of manufacturing gallium nitride semiconductor
    4.
    发明授权
    Method of manufacturing gallium nitride semiconductor 有权
    制造氮化镓半导体的方法

    公开(公告)号:US07615470B2

    公开(公告)日:2009-11-10

    申请号:US11302957

    申请日:2005-12-13

    Abstract: The present invention provides to a gallium nitride (GaN) semiconductor and a method of manufacturing the same, capable of reducing crystal defects caused by a difference in lattice parameters, and minimizing internal residual stress. In particular, since a high-quality GaN thin film is formed on a silicon wafer, manufacturing costs can be reduced by securing high-quality wafers with a large diameter at a low price, and applicability to a variety of devices and circuit can also be improved.

    Abstract translation: 本发明提供一种氮化镓(GaN)半导体及其制造方法,其能够减少由晶格参数的差异引起的晶体缺陷,并使内部残余应力最小化。 特别地,由于在硅晶片上形成高质量的GaN薄膜,所以可以通过以较低的价格确保大直径的高品质晶片来降低制造成本,并且适用于各种器件和电路也可以 改进。

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