公开(公告)号：US20060096533A1

公开(公告)日：2006-05-11

申请号：US10537251

申请日：2003-10-31

Applicant: Yasunori Mochizuki ,  Megumu Makino ,  Mutsunori Koyomogi

Inventor： Yasunori Mochizuki ,  Megumu Makino ,  Mutsunori Koyomogi

IPC: H01L21/306 ,  C23C16/00

CPC classification number: F16K27/003

Abstract: A body 2 comprises a center channel block 11 and side channel blocks 12, 13. Each of shut-off valves 5, 6 is removably mounted on both the center channel block and one of the side channel blocks. The center channel block has Y-shaped channels 22 identical in number with the number of the subgas inlets 23 and each comprising one common channel 22a and two branched channels 22b, 22c. The common channel 22a of the Y-shaped channel 22 has an opening serving as the subgas inlet 23 and the branched channels 22b, 22c of the Y-shaped channel 22 communicate with the inlet ports of the corresponding pair of shut-off valves 5, 6 to thereby provide the subgas inflow channels. The main gas channel 18 and the main channel communication passageways 19 are formed in one of the side channel blocks 12, and the vent gas channel 20 and the vent channel communication passageways 21 are formed on the other side channel block 13.

Abstract translation: 主体2包括中心通道块11和侧通道块12,13。 每个截止阀5,6可拆卸地安装在中心通道块和侧通道块之一上。 中心通道块具有与子气体入口23的数量相同的Y形通道22，并且每个包括一个公共通道22a和两个分支通道22b，22c。 Y形通道22的公共通道22a具有用作副气体入口23的开口，Y形通道22的分支通道22b，22c与相应的一对关闭的入口连通 阀5,6，从而提供沼气流入通道。 主气体通道18和主通道连通通道19形成在一个侧通道块12中，并且排气通道20和通气通道连通通道21形成在另一侧通道块13上。

公开(公告)号：US20090019939A1

公开(公告)日：2009-01-22

申请号：US12223022

申请日：2007-01-24

Applicant: Izuru Shikata ,  Megumu Makino ,  Mutsunori Koyomogi ,  Masamori Tsukada ,  Jubee Aizawa

Inventor： Izuru Shikata ,  Megumu Makino ,  Mutsunori Koyomogi ,  Masamori Tsukada ,  Jubee Aizawa

IPC: G01L19/00

CPC classification number: F16L41/008 ,  G01L19/0007

Abstract: The present invention provides a pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).

Abstract translation: 本发明提供一种压力传感器装置，其能够提供集成的流体控制装置，其中压力传感器容易被独立地替换，并且实现更紧凑的结构，以及压力传感器内置的流体控制设备。 压力传感器装置（21）包括：第一通道块（22），其中形成有预定通道（22a）;第二通道块（23），其中形成有预定通道（23a）并与第一通道 （22），以及压力传感器（24），其设置在所述第一和第二通路块（23）中的任一个的相对面上并检测内部通路（23b）中的流体压力，以及 集成在压力调节器（16）中。

公开(公告)号：US09395006B2

公开(公告)日：2016-07-19

申请号：US14124860

申请日：2012-05-31

Applicant: Shunya Ikeda ,  Mutsunori Koyomogi ,  Megumu Makino ,  Toshiyuki Inada

Inventor： Shunya Ikeda ,  Mutsunori Koyomogi ,  Megumu Makino ,  Toshiyuki Inada

IPC: F16K15/02 ,  F16K25/00 ,  F16K17/04

CPC classification number: F16K15/026 ,  F16K15/025 ,  F16K17/0466 ,  F16K25/005 ,  Y10T137/7924

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Abstract translation: 为了提供即使在高温条件下也可以克服与高温使用相关的“阀元件粘着密封件”而提高耐热性的缺点的止回阀。 通过使由偏置构件偏置的阀元件与密封构件接触，形成在第一主体中的流体路径的开口进入关闭状态。 密封构件由后固化的全氟弹性体填料形成。 在阀元件上形成与密封构件成直线接触的环状密封部。

公开(公告)号：US09212755B2

公开(公告)日：2015-12-15

申请号：US13569676

申请日：2012-08-08

Applicant: Haruhiko Kuriki ,  Takahiro Matsuda ,  Mutsunori Koyomogi ,  Megumu Makino

Inventor： Haruhiko Kuriki ,  Takahiro Matsuda ,  Mutsunori Koyomogi ,  Megumu Makino

IPC: F16K11/20 ,  F16K27/00

CPC classification number: F16K27/003 ,  Y10T137/87249

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.

Abstract translation: 流体控制装置包括彼此对称并具有相同形状的两个开闭阀2,3，两个具有相等长度的流体排放通道6,7,11,12彼此平行地设置在 开闭阀2,3和连接部件10，该连接部件10可连接到一个室，并且具有两个流体通道25,26，该流体通道25,26与两个流体排出通道6,7,11,12相等并连通，连接件 设置在两个流体排出通道6,7,11,12的出口中。

公开(公告)号：US07814797B2

公开(公告)日：2010-10-19

申请号：US12223022

申请日：2007-01-24

Applicant: Izuru Shikata ,  Megumu Makino ,  Mutsunori Koyomogi ,  Masamori Tsukada ,  Jubee Aizawa

Inventor： Izuru Shikata ,  Megumu Makino ,  Mutsunori Koyomogi ,  Masamori Tsukada ,  Jubee Aizawa

IPC: G01L7/00

CPC classification number: F16L41/008 ,  G01L19/0007

Abstract: A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).

Abstract translation: 一种压力传感器装置，其能够提供集成的流体控制装置，其中压力传感器容易被独立地替换，并且实现更紧凑的结构，以及压力传感器内置的流体控制设备。 压力传感器装置（21）包括：第一通道块（22），其中形成有预定通道（22a）;第二通道块（23），其中形成有预定通道（23a）并与第一通道 （22），以及压力传感器（24），其设置在所述第一和第二通路块（23）中的任一个的相对面上并检测内部通路（23b）中的流体压力，以及 集成在压力调节器（16）中。

公开(公告)号：US20140216575A1

公开(公告)日：2014-08-07

申请号：US14124860

申请日：2012-05-31

Applicant: Shunya Ikeda ,  Mutsunori Koyomogi ,  Megumu Makino ,  Toshiyuki Inada

Inventor： Shunya Ikeda ,  Mutsunori Koyomogi ,  Megumu Makino ,  Toshiyuki Inada

IPC: F16K15/02 ,  F16K25/00

CPC classification number: F16K15/026 ,  F16K15/025 ,  F16K17/0466 ,  F16K25/005 ,  Y10T137/7924

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Abstract translation: 为了提供即使在高温条件下也可以克服与高温使用相关的“阀元件粘着密封件”而提高耐热性的缺点的止回阀。 通过使由偏置构件偏置的阀元件与密封构件接触，形成在第一主体中的流体路径的开口进入关闭状态。 密封构件由后固化的全氟弹性体填料形成。 在阀元件上形成与密封构件成直线接触的环状密封部。

公开(公告)号：US20130037145A1

公开(公告)日：2013-02-14

申请号：US13569676

申请日：2012-08-08

Applicant: Haruhiko Kuriki ,  Takahiro Matsuda ,  Mutsunori Koyomogi ,  Megumu Makino

Inventor： Haruhiko Kuriki ,  Takahiro Matsuda ,  Mutsunori Koyomogi ,  Megumu Makino

IPC: F16K11/22

CPC classification number: F16K27/003 ,  Y10T137/87249

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.

Abstract translation: 流体控制装置包括彼此对称并具有相同形状的两个开闭阀2,3，两个具有相等长度的流体排放通道6,7,11,12彼此平行地设置在 开闭阀2,3和连接部件10，该连接部件10可连接到一个室，并且具有两个流体通道25,26，该流体通道25,26与两个流体排出通道6,7,11,12相等并连通，连接件 设置在两个流体排出通道6,7,11,12的出口中。