公开(公告)号：US12046789B1

公开(公告)日：2024-07-23

申请号：US18648408

申请日：2024-04-28

申请人： Xidian University

发明人： Jiajia Liao ,  Min Liao ,  Maliang Liu ,  Ziyu Wang ,  Yunpeng Li ,  Yichun Zhou

IPC分类号： H01P1/18 ,  H01P11/00

CPC分类号： H01P1/181 ,  H01P1/184 ,  H01P11/00

摘要： A ferroelectric film phase shifter includes a substrate layer; an isolated signal layer located on the substrate layer; first, second and third top transmission line electrodes distributed on the isolated signal layer at intervals; the first and second top transmission line electrodes located at both ends of the isolated signal layer, and the third top transmission line electrode located on a middle region of the isolated signal layer; a bottom transmission line electrode located in the isolated signal layer; an intermediate transmission line structure located in a middle region of the bottom transmission line electrode and adjacent to the third top transmission line electrode; MIM hafnium oxide-based ferroelectric capacitor structures located at two ends of the bottom transmission line electrode; and metal transmission line structures located between each MIM hafnium oxide-based ferroelectric capacitor structure and each of the first top transmission line electrode and the second top transmission line electrode.